1/19/2011	10:00:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2011	10:00:53 AM	Recipe started at 10:00 AM
1/19/2011	10:00:53 AM	H2 valve closed
1/19/2011	10:00:53 AM	BCl3 valve closed
1/19/2011	10:00:53 AM	PH3 valve closed
1/19/2011	10:00:53 AM	SiCl4 pre valve closed
1/19/2011	10:00:53 AM	SiCl4 post valve closed
1/19/2011	10:00:53 AM	Main Vac valve closed
1/19/2011	10:00:53 AM	Bypass valve closed
1/19/2011	10:00:53 AM	Bubbler valve closed
1/19/2011	10:00:53 AM	Helium valve opened
1/19/2011	10:00:53 AM	Helium MFC set to  500.000000
1/19/2011	10:00:53 AM	H2 MFC set to  0.000000
1/19/2011	10:00:53 AM	BCl3 MFC set to  0.000000
1/19/2011	10:00:53 AM	PHl3 MFC set to  0.000000
1/19/2011	10:00:53 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:00:53 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:00:53 AM	Tube furnace set to 0
1/19/2011	10:02:13 AM	Helium valve closed
1/19/2011	10:02:13 AM	H2 valve closed
1/19/2011	10:02:13 AM	BCl3 valve closed
1/19/2011	10:02:13 AM	PH3 valve closed
1/19/2011	10:02:13 AM	SiCl4 pre valve closed
1/19/2011	10:02:13 AM	SiCl4 post valve closed
1/19/2011	10:02:13 AM	Main Vac valve closed
1/19/2011	10:02:13 AM	Bypass valve closed
1/19/2011	10:02:13 AM	Bubbler valve closed
1/19/2011	10:02:13 AM	Helium MFC set to  0.000000
1/19/2011	10:02:13 AM	H2 MFC set to  0.000000
1/19/2011	10:02:13 AM	BCl3 MFC set to  0.000000
1/19/2011	10:02:13 AM	PHl3 MFC set to  0.000000
1/19/2011	10:02:13 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:02:13 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:02:13 AM	Tube furnace set to 0
1/19/2011	10:02:13 AM	Run finished at 10:02 AM
1/19/2011	10:02:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2011	10:09:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	10:09:18 AM	Recipe started at 10:09 AM
1/19/2011	10:09:18 AM	Helium valve closed
1/19/2011	10:09:18 AM	H2 valve closed
1/19/2011	10:09:18 AM	BCl3 valve closed
1/19/2011	10:09:18 AM	PH3 valve closed
1/19/2011	10:09:18 AM	SiCl4 pre valve closed
1/19/2011	10:09:18 AM	SiCl4 post valve closed
1/19/2011	10:09:18 AM	Main Vac valve closed
1/19/2011	10:09:18 AM	Bubbler valve closed
1/19/2011	10:09:18 AM	Bypass valve opened
1/19/2011	10:09:18 AM	Helium MFC set to  0.000000
1/19/2011	10:09:18 AM	H2 MFC set to  0.000000
1/19/2011	10:09:18 AM	BCl3 MFC set to  0.000000
1/19/2011	10:09:18 AM	PHl3 MFC set to  0.000000
1/19/2011	10:09:18 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:09:18 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:09:18 AM	Tube furnace set to 0
1/19/2011	10:09:50 AM	Helium valve closed
1/19/2011	10:09:50 AM	H2 valve closed
1/19/2011	10:09:50 AM	BCl3 valve closed
1/19/2011	10:09:50 AM	PH3 valve closed
1/19/2011	10:09:50 AM	SiCl4 pre valve closed
1/19/2011	10:09:50 AM	SiCl4 post valve closed
1/19/2011	10:09:50 AM	Bubbler valve closed
1/19/2011	10:09:50 AM	Main Vac valve opened
1/19/2011	10:09:50 AM	Bypass valve opened
1/19/2011	10:09:50 AM	Helium MFC set to  0.000000
1/19/2011	10:09:50 AM	H2 MFC set to  0.000000
1/19/2011	10:09:50 AM	BCl3 MFC set to  0.000000
1/19/2011	10:09:50 AM	PHl3 MFC set to  0.000000
1/19/2011	10:09:50 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:09:50 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:09:50 AM	Tube furnace set to 0
1/19/2011	10:09:50 AM	Run finished at 10:09 AM
1/19/2011	10:09:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	10:11:26 AM	Tube furnace set to 200
1/19/2011	10:13:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	10:13:29 AM	Recipe started at 10:13 AM
1/19/2011	10:13:29 AM	Helium valve closed
1/19/2011	10:13:29 AM	H2 valve closed
1/19/2011	10:13:29 AM	BCl3 valve closed
1/19/2011	10:13:29 AM	PH3 valve closed
1/19/2011	10:13:29 AM	SiCl4 pre valve closed
1/19/2011	10:13:29 AM	SiCl4 post valve closed
1/19/2011	10:13:29 AM	Main Vac valve closed
1/19/2011	10:13:29 AM	Bubbler valve closed
1/19/2011	10:13:29 AM	Bypass valve opened
1/19/2011	10:13:29 AM	Helium MFC set to  0.000000
1/19/2011	10:13:29 AM	H2 MFC set to  0.000000
1/19/2011	10:13:29 AM	BCl3 MFC set to  0.000000
1/19/2011	10:13:29 AM	PHl3 MFC set to  0.000000
1/19/2011	10:13:29 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:13:29 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:13:29 AM	Tube furnace set to 0
1/19/2011	10:13:29 AM	Helium valve closed
1/19/2011	10:13:29 AM	H2 valve closed
1/19/2011	10:13:29 AM	BCl3 valve closed
1/19/2011	10:13:29 AM	PH3 valve closed
1/19/2011	10:13:29 AM	SiCl4 pre valve closed
1/19/2011	10:13:29 AM	SiCl4 post valve closed
1/19/2011	10:13:29 AM	Bubbler valve closed
1/19/2011	10:13:29 AM	Main Vac valve opened
1/19/2011	10:13:29 AM	Bypass valve opened
1/19/2011	10:13:29 AM	Helium MFC set to  0.000000
1/19/2011	10:13:29 AM	H2 MFC set to  0.000000
1/19/2011	10:13:29 AM	BCl3 MFC set to  0.000000
1/19/2011	10:13:29 AM	PHl3 MFC set to  0.000000
1/19/2011	10:13:29 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:13:29 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:13:29 AM	Tube furnace set to 0
1/19/2011	10:14:29 AM	H2 valve closed
1/19/2011	10:14:29 AM	BCl3 valve closed
1/19/2011	10:14:29 AM	PH3 valve closed
1/19/2011	10:14:29 AM	SiCl4 pre valve closed
1/19/2011	10:14:29 AM	SiCl4 post valve closed
1/19/2011	10:14:29 AM	Bubbler valve closed
1/19/2011	10:14:29 AM	Helium valve opened
1/19/2011	10:14:29 AM	Main Vac valve opened
1/19/2011	10:14:29 AM	Bypass valve opened
1/19/2011	10:14:29 AM	Helium MFC set to  100.000000
1/19/2011	10:14:29 AM	H2 MFC set to  0.000000
1/19/2011	10:14:29 AM	BCl3 MFC set to  0.000000
1/19/2011	10:14:29 AM	PHl3 MFC set to  0.000000
1/19/2011	10:14:29 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:14:29 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:14:30 AM	Tube furnace set to 0
1/19/2011	10:15:30 AM	Helium valve closed
1/19/2011	10:15:30 AM	H2 valve closed
1/19/2011	10:15:30 AM	BCl3 valve closed
1/19/2011	10:15:30 AM	PH3 valve closed
1/19/2011	10:15:30 AM	SiCl4 pre valve closed
1/19/2011	10:15:30 AM	SiCl4 post valve closed
1/19/2011	10:15:30 AM	Bubbler valve closed
1/19/2011	10:15:30 AM	Main Vac valve opened
1/19/2011	10:15:30 AM	Bypass valve opened
1/19/2011	10:15:30 AM	Helium MFC set to  0.000000
1/19/2011	10:15:30 AM	H2 MFC set to  0.000000
1/19/2011	10:15:30 AM	BCl3 MFC set to  0.000000
1/19/2011	10:15:30 AM	PHl3 MFC set to  0.000000
1/19/2011	10:15:30 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:15:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:15:30 AM	Tube furnace set to 0
1/19/2011	10:16:30 AM	H2 valve closed
1/19/2011	10:16:30 AM	BCl3 valve closed
1/19/2011	10:16:30 AM	PH3 valve closed
1/19/2011	10:16:30 AM	SiCl4 pre valve closed
1/19/2011	10:16:30 AM	SiCl4 post valve closed
1/19/2011	10:16:30 AM	Bubbler valve closed
1/19/2011	10:16:30 AM	Helium valve opened
1/19/2011	10:16:30 AM	Main Vac valve opened
1/19/2011	10:16:30 AM	Bypass valve opened
1/19/2011	10:16:30 AM	Helium MFC set to  100.000000
1/19/2011	10:16:30 AM	H2 MFC set to  0.000000
1/19/2011	10:16:30 AM	BCl3 MFC set to  0.000000
1/19/2011	10:16:30 AM	PHl3 MFC set to  0.000000
1/19/2011	10:16:30 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:16:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:16:30 AM	Tube furnace set to 0
1/19/2011	10:17:30 AM	Helium valve closed
1/19/2011	10:17:30 AM	H2 valve closed
1/19/2011	10:17:30 AM	BCl3 valve closed
1/19/2011	10:17:30 AM	PH3 valve closed
1/19/2011	10:17:30 AM	SiCl4 pre valve closed
1/19/2011	10:17:30 AM	SiCl4 post valve closed
1/19/2011	10:17:30 AM	Bubbler valve closed
1/19/2011	10:17:30 AM	Main Vac valve opened
1/19/2011	10:17:30 AM	Bypass valve opened
1/19/2011	10:17:30 AM	Helium MFC set to  0.000000
1/19/2011	10:17:30 AM	H2 MFC set to  0.000000
1/19/2011	10:17:30 AM	BCl3 MFC set to  0.000000
1/19/2011	10:17:30 AM	PHl3 MFC set to  0.000000
1/19/2011	10:17:30 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:17:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:17:30 AM	Tube furnace set to 0
1/19/2011	10:18:30 AM	H2 valve closed
1/19/2011	10:18:30 AM	BCl3 valve closed
1/19/2011	10:18:30 AM	PH3 valve closed
1/19/2011	10:18:30 AM	SiCl4 pre valve closed
1/19/2011	10:18:30 AM	SiCl4 post valve closed
1/19/2011	10:18:30 AM	Bubbler valve closed
1/19/2011	10:18:30 AM	Helium valve opened
1/19/2011	10:18:30 AM	Main Vac valve opened
1/19/2011	10:18:30 AM	Bypass valve opened
1/19/2011	10:18:30 AM	Helium MFC set to  100.000000
1/19/2011	10:18:30 AM	H2 MFC set to  0.000000
1/19/2011	10:18:30 AM	BCl3 MFC set to  0.000000
1/19/2011	10:18:30 AM	PHl3 MFC set to  0.000000
1/19/2011	10:18:30 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:18:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:18:30 AM	Tube furnace set to 0
1/19/2011	10:19:30 AM	Helium valve closed
1/19/2011	10:19:30 AM	H2 valve closed
1/19/2011	10:19:30 AM	BCl3 valve closed
1/19/2011	10:19:30 AM	PH3 valve closed
1/19/2011	10:19:30 AM	SiCl4 pre valve closed
1/19/2011	10:19:30 AM	SiCl4 post valve closed
1/19/2011	10:19:30 AM	Bubbler valve closed
1/19/2011	10:19:30 AM	Main Vac valve opened
1/19/2011	10:19:30 AM	Bypass valve opened
1/19/2011	10:19:30 AM	Helium MFC set to  0.000000
1/19/2011	10:19:30 AM	H2 MFC set to  0.000000
1/19/2011	10:19:30 AM	BCl3 MFC set to  0.000000
1/19/2011	10:19:30 AM	PHl3 MFC set to  0.000000
1/19/2011	10:19:30 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:19:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:19:31 AM	Tube furnace set to 0
1/19/2011	10:20:31 AM	H2 valve closed
1/19/2011	10:20:31 AM	BCl3 valve closed
1/19/2011	10:20:31 AM	PH3 valve closed
1/19/2011	10:20:31 AM	SiCl4 pre valve closed
1/19/2011	10:20:31 AM	SiCl4 post valve closed
1/19/2011	10:20:31 AM	Bubbler valve closed
1/19/2011	10:20:31 AM	Helium valve opened
1/19/2011	10:20:31 AM	Main Vac valve opened
1/19/2011	10:20:31 AM	Bypass valve opened
1/19/2011	10:20:31 AM	Helium MFC set to  100.000000
1/19/2011	10:20:31 AM	H2 MFC set to  0.000000
1/19/2011	10:20:31 AM	BCl3 MFC set to  0.000000
1/19/2011	10:20:31 AM	PHl3 MFC set to  0.000000
1/19/2011	10:20:31 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:20:31 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:20:31 AM	Tube furnace set to 0
1/19/2011	10:21:31 AM	Helium valve closed
1/19/2011	10:21:31 AM	H2 valve closed
1/19/2011	10:21:31 AM	BCl3 valve closed
1/19/2011	10:21:31 AM	PH3 valve closed
1/19/2011	10:21:31 AM	SiCl4 pre valve closed
1/19/2011	10:21:31 AM	SiCl4 post valve closed
1/19/2011	10:21:31 AM	Bubbler valve closed
1/19/2011	10:21:31 AM	Main Vac valve opened
1/19/2011	10:21:31 AM	Bypass valve opened
1/19/2011	10:21:31 AM	Helium MFC set to  0.000000
1/19/2011	10:21:31 AM	H2 MFC set to  0.000000
1/19/2011	10:21:31 AM	BCl3 MFC set to  0.000000
1/19/2011	10:21:31 AM	PHl3 MFC set to  0.000000
1/19/2011	10:21:31 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:21:31 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:21:31 AM	Tube furnace set to 0
1/19/2011	10:22:31 AM	H2 valve closed
1/19/2011	10:22:31 AM	BCl3 valve closed
1/19/2011	10:22:31 AM	PH3 valve closed
1/19/2011	10:22:31 AM	SiCl4 pre valve closed
1/19/2011	10:22:31 AM	SiCl4 post valve closed
1/19/2011	10:22:31 AM	Bubbler valve closed
1/19/2011	10:22:31 AM	Helium valve opened
1/19/2011	10:22:31 AM	Main Vac valve opened
1/19/2011	10:22:31 AM	Bypass valve opened
1/19/2011	10:22:31 AM	Helium MFC set to  100.000000
1/19/2011	10:22:31 AM	H2 MFC set to  0.000000
1/19/2011	10:22:31 AM	BCl3 MFC set to  0.000000
1/19/2011	10:22:31 AM	PHl3 MFC set to  0.000000
1/19/2011	10:22:31 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:22:31 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:22:31 AM	Tube furnace set to 0
1/19/2011	10:23:31 AM	Helium valve closed
1/19/2011	10:23:31 AM	H2 valve closed
1/19/2011	10:23:31 AM	BCl3 valve closed
1/19/2011	10:23:31 AM	PH3 valve closed
1/19/2011	10:23:31 AM	SiCl4 pre valve closed
1/19/2011	10:23:31 AM	SiCl4 post valve closed
1/19/2011	10:23:31 AM	Bubbler valve closed
1/19/2011	10:23:31 AM	Main Vac valve opened
1/19/2011	10:23:31 AM	Bypass valve opened
1/19/2011	10:23:31 AM	Helium MFC set to  0.000000
1/19/2011	10:23:31 AM	H2 MFC set to  0.000000
1/19/2011	10:23:31 AM	BCl3 MFC set to  0.000000
1/19/2011	10:23:31 AM	PHl3 MFC set to  0.000000
1/19/2011	10:23:31 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:23:31 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:23:31 AM	Tube furnace set to 0
1/19/2011	10:24:31 AM	H2 valve closed
1/19/2011	10:24:31 AM	BCl3 valve closed
1/19/2011	10:24:31 AM	PH3 valve closed
1/19/2011	10:24:31 AM	SiCl4 pre valve closed
1/19/2011	10:24:31 AM	SiCl4 post valve closed
1/19/2011	10:24:31 AM	Bubbler valve closed
1/19/2011	10:24:31 AM	Helium valve opened
1/19/2011	10:24:31 AM	Main Vac valve opened
1/19/2011	10:24:31 AM	Bypass valve opened
1/19/2011	10:24:31 AM	Helium MFC set to  100.000000
1/19/2011	10:24:31 AM	H2 MFC set to  0.000000
1/19/2011	10:24:31 AM	BCl3 MFC set to  0.000000
1/19/2011	10:24:31 AM	PHl3 MFC set to  0.000000
1/19/2011	10:24:31 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:24:31 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:24:32 AM	Tube furnace set to 0
1/19/2011	10:25:32 AM	Helium valve closed
1/19/2011	10:25:32 AM	H2 valve closed
1/19/2011	10:25:32 AM	BCl3 valve closed
1/19/2011	10:25:32 AM	PH3 valve closed
1/19/2011	10:25:32 AM	SiCl4 pre valve closed
1/19/2011	10:25:32 AM	SiCl4 post valve closed
1/19/2011	10:25:32 AM	Bubbler valve closed
1/19/2011	10:25:32 AM	Main Vac valve opened
1/19/2011	10:25:32 AM	Bypass valve opened
1/19/2011	10:25:32 AM	Helium MFC set to  0.000000
1/19/2011	10:25:32 AM	H2 MFC set to  0.000000
1/19/2011	10:25:32 AM	BCl3 MFC set to  0.000000
1/19/2011	10:25:32 AM	PHl3 MFC set to  0.000000
1/19/2011	10:25:32 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:25:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:25:32 AM	Tube furnace set to 0
1/19/2011	10:26:32 AM	H2 valve closed
1/19/2011	10:26:32 AM	BCl3 valve closed
1/19/2011	10:26:32 AM	PH3 valve closed
1/19/2011	10:26:32 AM	SiCl4 pre valve closed
1/19/2011	10:26:32 AM	SiCl4 post valve closed
1/19/2011	10:26:32 AM	Bubbler valve closed
1/19/2011	10:26:32 AM	Helium valve opened
1/19/2011	10:26:32 AM	Main Vac valve opened
1/19/2011	10:26:32 AM	Bypass valve opened
1/19/2011	10:26:32 AM	Helium MFC set to  100.000000
1/19/2011	10:26:32 AM	H2 MFC set to  0.000000
1/19/2011	10:26:32 AM	BCl3 MFC set to  0.000000
1/19/2011	10:26:32 AM	PHl3 MFC set to  0.000000
1/19/2011	10:26:32 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:26:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:26:32 AM	Tube furnace set to 0
1/19/2011	10:27:32 AM	Helium valve closed
1/19/2011	10:27:32 AM	H2 valve closed
1/19/2011	10:27:32 AM	BCl3 valve closed
1/19/2011	10:27:32 AM	PH3 valve closed
1/19/2011	10:27:32 AM	SiCl4 pre valve closed
1/19/2011	10:27:32 AM	SiCl4 post valve closed
1/19/2011	10:27:32 AM	Bubbler valve closed
1/19/2011	10:27:32 AM	Main Vac valve opened
1/19/2011	10:27:32 AM	Bypass valve opened
1/19/2011	10:27:32 AM	Helium MFC set to  0.000000
1/19/2011	10:27:32 AM	H2 MFC set to  0.000000
1/19/2011	10:27:32 AM	BCl3 MFC set to  0.000000
1/19/2011	10:27:32 AM	PHl3 MFC set to  0.000000
1/19/2011	10:27:32 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:27:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:27:32 AM	Tube furnace set to 0
1/19/2011	10:28:32 AM	H2 valve closed
1/19/2011	10:28:32 AM	BCl3 valve closed
1/19/2011	10:28:32 AM	PH3 valve closed
1/19/2011	10:28:32 AM	SiCl4 pre valve closed
1/19/2011	10:28:32 AM	SiCl4 post valve closed
1/19/2011	10:28:32 AM	Bubbler valve closed
1/19/2011	10:28:32 AM	Helium valve opened
1/19/2011	10:28:32 AM	Main Vac valve opened
1/19/2011	10:28:32 AM	Bypass valve opened
1/19/2011	10:28:32 AM	Helium MFC set to  100.000000
1/19/2011	10:28:32 AM	H2 MFC set to  0.000000
1/19/2011	10:28:32 AM	BCl3 MFC set to  0.000000
1/19/2011	10:28:32 AM	PHl3 MFC set to  0.000000
1/19/2011	10:28:32 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:28:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:28:32 AM	Tube furnace set to 0
1/19/2011	10:29:32 AM	Helium valve closed
1/19/2011	10:29:32 AM	H2 valve closed
1/19/2011	10:29:32 AM	BCl3 valve closed
1/19/2011	10:29:32 AM	PH3 valve closed
1/19/2011	10:29:32 AM	SiCl4 pre valve closed
1/19/2011	10:29:32 AM	SiCl4 post valve closed
1/19/2011	10:29:32 AM	Bubbler valve closed
1/19/2011	10:29:32 AM	Main Vac valve opened
1/19/2011	10:29:32 AM	Bypass valve opened
1/19/2011	10:29:32 AM	Helium MFC set to  0.000000
1/19/2011	10:29:32 AM	H2 MFC set to  0.000000
1/19/2011	10:29:32 AM	BCl3 MFC set to  0.000000
1/19/2011	10:29:32 AM	PHl3 MFC set to  0.000000
1/19/2011	10:29:32 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:29:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:29:33 AM	Tube furnace set to 0
1/19/2011	10:30:33 AM	H2 valve closed
1/19/2011	10:30:33 AM	BCl3 valve closed
1/19/2011	10:30:33 AM	PH3 valve closed
1/19/2011	10:30:33 AM	SiCl4 pre valve closed
1/19/2011	10:30:33 AM	SiCl4 post valve closed
1/19/2011	10:30:33 AM	Bubbler valve closed
1/19/2011	10:30:33 AM	Helium valve opened
1/19/2011	10:30:33 AM	Main Vac valve opened
1/19/2011	10:30:33 AM	Bypass valve opened
1/19/2011	10:30:33 AM	Helium MFC set to  100.000000
1/19/2011	10:30:33 AM	H2 MFC set to  0.000000
1/19/2011	10:30:33 AM	BCl3 MFC set to  0.000000
1/19/2011	10:30:33 AM	PHl3 MFC set to  0.000000
1/19/2011	10:30:33 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:30:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:30:33 AM	Tube furnace set to 0
1/19/2011	10:31:33 AM	Helium valve closed
1/19/2011	10:31:33 AM	H2 valve closed
1/19/2011	10:31:33 AM	BCl3 valve closed
1/19/2011	10:31:33 AM	PH3 valve closed
1/19/2011	10:31:33 AM	SiCl4 pre valve closed
1/19/2011	10:31:33 AM	SiCl4 post valve closed
1/19/2011	10:31:33 AM	Bubbler valve closed
1/19/2011	10:31:33 AM	Main Vac valve opened
1/19/2011	10:31:33 AM	Bypass valve opened
1/19/2011	10:31:33 AM	Helium MFC set to  0.000000
1/19/2011	10:31:33 AM	H2 MFC set to  0.000000
1/19/2011	10:31:33 AM	BCl3 MFC set to  0.000000
1/19/2011	10:31:33 AM	PHl3 MFC set to  0.000000
1/19/2011	10:31:33 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:31:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:31:33 AM	Tube furnace set to 0
1/19/2011	10:32:33 AM	H2 valve closed
1/19/2011	10:32:33 AM	BCl3 valve closed
1/19/2011	10:32:33 AM	PH3 valve closed
1/19/2011	10:32:33 AM	SiCl4 pre valve closed
1/19/2011	10:32:33 AM	SiCl4 post valve closed
1/19/2011	10:32:33 AM	Bubbler valve closed
1/19/2011	10:32:33 AM	Helium valve opened
1/19/2011	10:32:33 AM	Main Vac valve opened
1/19/2011	10:32:33 AM	Bypass valve opened
1/19/2011	10:32:33 AM	Helium MFC set to  100.000000
1/19/2011	10:32:33 AM	H2 MFC set to  0.000000
1/19/2011	10:32:33 AM	BCl3 MFC set to  0.000000
1/19/2011	10:32:33 AM	PHl3 MFC set to  0.000000
1/19/2011	10:32:33 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:32:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:32:33 AM	Tube furnace set to 0
1/19/2011	10:33:33 AM	Helium valve closed
1/19/2011	10:33:33 AM	H2 valve closed
1/19/2011	10:33:33 AM	BCl3 valve closed
1/19/2011	10:33:33 AM	PH3 valve closed
1/19/2011	10:33:33 AM	SiCl4 pre valve closed
1/19/2011	10:33:33 AM	SiCl4 post valve closed
1/19/2011	10:33:33 AM	Bubbler valve closed
1/19/2011	10:33:33 AM	Main Vac valve opened
1/19/2011	10:33:33 AM	Bypass valve opened
1/19/2011	10:33:33 AM	Helium MFC set to  0.000000
1/19/2011	10:33:33 AM	H2 MFC set to  0.000000
1/19/2011	10:33:33 AM	BCl3 MFC set to  0.000000
1/19/2011	10:33:33 AM	PHl3 MFC set to  0.000000
1/19/2011	10:33:33 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:33:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:33:34 AM	Tube furnace set to 0
1/19/2011	10:33:35 AM	Run finished at 10:33 AM
1/19/2011	10:33:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	10:40:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	10:40:25 AM	Recipe started at 10:40 AM
1/19/2011	10:40:25 AM	Helium valve closed
1/19/2011	10:40:25 AM	H2 valve closed
1/19/2011	10:40:25 AM	BCl3 valve closed
1/19/2011	10:40:25 AM	PH3 valve closed
1/19/2011	10:40:25 AM	SiCl4 pre valve closed
1/19/2011	10:40:25 AM	SiCl4 post valve closed
1/19/2011	10:40:25 AM	Main Vac valve closed
1/19/2011	10:40:25 AM	Bubbler valve closed
1/19/2011	10:40:25 AM	Bypass valve opened
1/19/2011	10:40:25 AM	Helium MFC set to  0.000000
1/19/2011	10:40:25 AM	H2 MFC set to  0.000000
1/19/2011	10:40:25 AM	BCl3 MFC set to  0.000000
1/19/2011	10:40:25 AM	PHl3 MFC set to  0.000000
1/19/2011	10:40:25 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:40:25 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:40:25 AM	Tube furnace set to 0
1/19/2011	10:40:25 AM	Helium valve closed
1/19/2011	10:40:25 AM	H2 valve closed
1/19/2011	10:40:25 AM	BCl3 valve closed
1/19/2011	10:40:25 AM	PH3 valve closed
1/19/2011	10:40:25 AM	SiCl4 pre valve closed
1/19/2011	10:40:25 AM	SiCl4 post valve closed
1/19/2011	10:40:25 AM	Bubbler valve closed
1/19/2011	10:40:25 AM	Main Vac valve opened
1/19/2011	10:40:25 AM	Bypass valve opened
1/19/2011	10:40:25 AM	Helium MFC set to  0.000000
1/19/2011	10:40:25 AM	H2 MFC set to  0.000000
1/19/2011	10:40:25 AM	BCl3 MFC set to  0.000000
1/19/2011	10:40:25 AM	PHl3 MFC set to  0.000000
1/19/2011	10:40:25 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:40:25 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:40:25 AM	Tube furnace set to 0
1/19/2011	10:41:25 AM	H2 valve closed
1/19/2011	10:41:25 AM	BCl3 valve closed
1/19/2011	10:41:25 AM	PH3 valve closed
1/19/2011	10:41:25 AM	SiCl4 pre valve closed
1/19/2011	10:41:25 AM	SiCl4 post valve closed
1/19/2011	10:41:25 AM	Bubbler valve closed
1/19/2011	10:41:25 AM	Helium valve opened
1/19/2011	10:41:25 AM	Main Vac valve opened
1/19/2011	10:41:25 AM	Bypass valve opened
1/19/2011	10:41:25 AM	Helium MFC set to  100.000000
1/19/2011	10:41:25 AM	H2 MFC set to  0.000000
1/19/2011	10:41:25 AM	BCl3 MFC set to  0.000000
1/19/2011	10:41:25 AM	PHl3 MFC set to  0.000000
1/19/2011	10:41:25 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:41:25 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:41:26 AM	Tube furnace set to 0
1/19/2011	10:42:26 AM	Helium valve closed
1/19/2011	10:42:26 AM	H2 valve closed
1/19/2011	10:42:26 AM	BCl3 valve closed
1/19/2011	10:42:26 AM	PH3 valve closed
1/19/2011	10:42:26 AM	SiCl4 pre valve closed
1/19/2011	10:42:26 AM	SiCl4 post valve closed
1/19/2011	10:42:26 AM	Bubbler valve closed
1/19/2011	10:42:26 AM	Main Vac valve opened
1/19/2011	10:42:26 AM	Bypass valve opened
1/19/2011	10:42:26 AM	Helium MFC set to  0.000000
1/19/2011	10:42:26 AM	H2 MFC set to  0.000000
1/19/2011	10:42:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:42:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:42:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:42:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:42:26 AM	Tube furnace set to 0
1/19/2011	10:43:26 AM	H2 valve closed
1/19/2011	10:43:26 AM	BCl3 valve closed
1/19/2011	10:43:26 AM	PH3 valve closed
1/19/2011	10:43:26 AM	SiCl4 pre valve closed
1/19/2011	10:43:26 AM	SiCl4 post valve closed
1/19/2011	10:43:26 AM	Bubbler valve closed
1/19/2011	10:43:26 AM	Helium valve opened
1/19/2011	10:43:26 AM	Main Vac valve opened
1/19/2011	10:43:26 AM	Bypass valve opened
1/19/2011	10:43:26 AM	Helium MFC set to  100.000000
1/19/2011	10:43:26 AM	H2 MFC set to  0.000000
1/19/2011	10:43:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:43:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:43:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:43:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:43:26 AM	Tube furnace set to 0
1/19/2011	10:44:26 AM	Helium valve closed
1/19/2011	10:44:26 AM	H2 valve closed
1/19/2011	10:44:26 AM	BCl3 valve closed
1/19/2011	10:44:26 AM	PH3 valve closed
1/19/2011	10:44:26 AM	SiCl4 pre valve closed
1/19/2011	10:44:26 AM	SiCl4 post valve closed
1/19/2011	10:44:26 AM	Bubbler valve closed
1/19/2011	10:44:26 AM	Main Vac valve opened
1/19/2011	10:44:26 AM	Bypass valve opened
1/19/2011	10:44:26 AM	Helium MFC set to  0.000000
1/19/2011	10:44:26 AM	H2 MFC set to  0.000000
1/19/2011	10:44:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:44:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:44:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:44:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:44:26 AM	Tube furnace set to 0
1/19/2011	10:45:26 AM	H2 valve closed
1/19/2011	10:45:26 AM	BCl3 valve closed
1/19/2011	10:45:26 AM	PH3 valve closed
1/19/2011	10:45:26 AM	SiCl4 pre valve closed
1/19/2011	10:45:26 AM	SiCl4 post valve closed
1/19/2011	10:45:26 AM	Bubbler valve closed
1/19/2011	10:45:26 AM	Helium valve opened
1/19/2011	10:45:26 AM	Main Vac valve opened
1/19/2011	10:45:26 AM	Bypass valve opened
1/19/2011	10:45:26 AM	Helium MFC set to  100.000000
1/19/2011	10:45:26 AM	H2 MFC set to  0.000000
1/19/2011	10:45:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:45:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:45:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:45:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:45:26 AM	Tube furnace set to 0
1/19/2011	10:46:26 AM	Helium valve closed
1/19/2011	10:46:26 AM	H2 valve closed
1/19/2011	10:46:26 AM	BCl3 valve closed
1/19/2011	10:46:26 AM	PH3 valve closed
1/19/2011	10:46:26 AM	SiCl4 pre valve closed
1/19/2011	10:46:26 AM	SiCl4 post valve closed
1/19/2011	10:46:26 AM	Bubbler valve closed
1/19/2011	10:46:26 AM	Main Vac valve opened
1/19/2011	10:46:26 AM	Bypass valve opened
1/19/2011	10:46:26 AM	Helium MFC set to  0.000000
1/19/2011	10:46:26 AM	H2 MFC set to  0.000000
1/19/2011	10:46:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:46:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:46:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:46:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:46:27 AM	Tube furnace set to 0
1/19/2011	10:47:23 AM	Run aborted at 10:47 AM
1/19/2011	10:47:23 AM	Helium valve closed
1/19/2011	10:47:23 AM	H2 valve closed
1/19/2011	10:47:23 AM	BCl3 valve closed
1/19/2011	10:47:23 AM	PH3 valve closed
1/19/2011	10:47:23 AM	SiCl4 pre valve closed
1/19/2011	10:47:23 AM	SiCl4 post valve closed
1/19/2011	10:47:23 AM	Bypass valve closed
1/19/2011	10:47:23 AM	Main Vac valve closed
1/19/2011	10:47:23 AM	Bubbler valve closed
1/19/2011	10:47:23 AM	Helium MFC set to  0.000000
1/19/2011	10:47:23 AM	H2 MFC set to  0.000000
1/19/2011	10:47:23 AM	BCl3 MFC set to  0.000000
1/19/2011	10:47:23 AM	PHl3 MFC set to  0.000000
1/19/2011	10:47:23 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:47:23 AM	Tube furnace set to 0
1/19/2011	10:47:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	10:47:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	10:47:26 AM	Recipe started at 10:47 AM
1/19/2011	10:47:26 AM	Helium valve closed
1/19/2011	10:47:26 AM	H2 valve closed
1/19/2011	10:47:26 AM	BCl3 valve closed
1/19/2011	10:47:26 AM	PH3 valve closed
1/19/2011	10:47:26 AM	SiCl4 pre valve closed
1/19/2011	10:47:26 AM	SiCl4 post valve closed
1/19/2011	10:47:26 AM	Main Vac valve closed
1/19/2011	10:47:26 AM	Bubbler valve closed
1/19/2011	10:47:26 AM	Bypass valve opened
1/19/2011	10:47:26 AM	Helium MFC set to  0.000000
1/19/2011	10:47:26 AM	H2 MFC set to  0.000000
1/19/2011	10:47:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:47:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:47:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:47:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:47:26 AM	Tube furnace set to 0
1/19/2011	10:47:26 AM	Helium valve closed
1/19/2011	10:47:26 AM	H2 valve closed
1/19/2011	10:47:26 AM	BCl3 valve closed
1/19/2011	10:47:26 AM	PH3 valve closed
1/19/2011	10:47:26 AM	SiCl4 pre valve closed
1/19/2011	10:47:26 AM	SiCl4 post valve closed
1/19/2011	10:47:26 AM	Bubbler valve closed
1/19/2011	10:47:26 AM	Main Vac valve opened
1/19/2011	10:47:26 AM	Bypass valve opened
1/19/2011	10:47:26 AM	Helium MFC set to  0.000000
1/19/2011	10:47:26 AM	H2 MFC set to  0.000000
1/19/2011	10:47:26 AM	BCl3 MFC set to  0.000000
1/19/2011	10:47:26 AM	PHl3 MFC set to  0.000000
1/19/2011	10:47:26 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:47:26 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:47:26 AM	Tube furnace set to 0
1/19/2011	10:47:27 AM	Run finished at 10:47 AM
1/19/2011	10:47:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	10:49:05 AM	Bypass valve closed
1/19/2011	10:49:06 AM	Main Vac valve closed
1/19/2011	10:49:15 AM	Main Vac valve opened
1/19/2011	10:49:15 AM	Bypass valve opened
1/19/2011	10:50:58 AM	Recipe started at 10:50 AM
1/19/2011	10:50:58 AM	Helium valve closed
1/19/2011	10:50:58 AM	BCl3 valve closed
1/19/2011	10:50:58 AM	PH3 valve closed
1/19/2011	10:50:58 AM	SiCl4 pre valve closed
1/19/2011	10:50:58 AM	SiCl4 post valve closed
1/19/2011	10:50:58 AM	Main Vac valve closed
1/19/2011	10:50:58 AM	Bypass valve closed
1/19/2011	10:50:58 AM	Bubbler valve closed
1/19/2011	10:50:58 AM	H2 valve opened
1/19/2011	10:50:58 AM	Helium MFC set to  0.000000
1/19/2011	10:50:58 AM	H2 MFC set to  500.000000
1/19/2011	10:50:58 AM	BCl3 MFC set to  0.000000
1/19/2011	10:50:58 AM	PHl3 MFC set to  0.000000
1/19/2011	10:50:58 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:50:58 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:50:58 AM	Tube furnace set to 0
1/19/2011	10:51:39 AM	Run aborted at 10:51 AM
1/19/2011	10:51:39 AM	Helium valve closed
1/19/2011	10:51:39 AM	H2 valve closed
1/19/2011	10:51:39 AM	BCl3 valve closed
1/19/2011	10:51:39 AM	PH3 valve closed
1/19/2011	10:51:39 AM	SiCl4 pre valve closed
1/19/2011	10:51:39 AM	SiCl4 post valve closed
1/19/2011	10:51:39 AM	Bypass valve closed
1/19/2011	10:51:39 AM	Main Vac valve closed
1/19/2011	10:51:39 AM	Bubbler valve closed
1/19/2011	10:51:39 AM	Helium MFC set to  0.000000
1/19/2011	10:51:39 AM	H2 MFC set to  0.000000
1/19/2011	10:51:39 AM	BCl3 MFC set to  0.000000
1/19/2011	10:51:39 AM	PHl3 MFC set to  0.000000
1/19/2011	10:51:39 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:51:39 AM	Tube furnace set to 0
1/19/2011	10:51:47 AM	Recipe started at 10:51 AM
1/19/2011	10:51:47 AM	Helium valve closed
1/19/2011	10:51:47 AM	BCl3 valve closed
1/19/2011	10:51:47 AM	PH3 valve closed
1/19/2011	10:51:47 AM	SiCl4 pre valve closed
1/19/2011	10:51:47 AM	SiCl4 post valve closed
1/19/2011	10:51:47 AM	Main Vac valve closed
1/19/2011	10:51:47 AM	Bypass valve closed
1/19/2011	10:51:47 AM	Bubbler valve closed
1/19/2011	10:51:47 AM	H2 valve opened
1/19/2011	10:51:47 AM	Helium MFC set to  0.000000
1/19/2011	10:51:47 AM	H2 MFC set to  500.000000
1/19/2011	10:51:47 AM	BCl3 MFC set to  0.000000
1/19/2011	10:51:47 AM	PHl3 MFC set to  0.000000
1/19/2011	10:51:47 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:51:47 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:51:47 AM	Tube furnace set to 0
1/19/2011	10:52:27 AM	Helium valve closed
1/19/2011	10:52:27 AM	BCl3 valve closed
1/19/2011	10:52:27 AM	PH3 valve closed
1/19/2011	10:52:27 AM	SiCl4 pre valve closed
1/19/2011	10:52:27 AM	SiCl4 post valve closed
1/19/2011	10:52:27 AM	Main Vac valve closed
1/19/2011	10:52:27 AM	Bypass valve closed
1/19/2011	10:52:27 AM	H2 valve opened
1/19/2011	10:52:27 AM	Bubbler valve opened
1/19/2011	10:52:27 AM	Helium MFC set to  0.000000
1/19/2011	10:52:27 AM	H2 MFC set to  500.000000
1/19/2011	10:52:27 AM	BCl3 MFC set to  0.000000
1/19/2011	10:52:27 AM	PHl3 MFC set to  0.000000
1/19/2011	10:52:27 AM	SiCl4 MFC set to  0.000000
1/19/2011	10:52:27 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	10:52:27 AM	Tube furnace set to 1000
1/19/2011	11:12:27 AM	Helium valve closed
1/19/2011	11:12:27 AM	PH3 valve closed
1/19/2011	11:12:27 AM	Main Vac valve closed
1/19/2011	11:12:27 AM	Bypass valve closed
1/19/2011	11:12:27 AM	H2 valve opened
1/19/2011	11:12:27 AM	BCl3 valve opened
1/19/2011	11:12:27 AM	SiCl4 pre valve opened
1/19/2011	11:12:27 AM	SiCl4 post valve opened
1/19/2011	11:12:27 AM	Bubbler valve opened
1/19/2011	11:12:27 AM	Helium MFC set to  0.000000
1/19/2011	11:12:27 AM	H2 MFC set to  500.000000
1/19/2011	11:12:27 AM	BCl3 MFC set to  2.000000
1/19/2011	11:12:27 AM	PHl3 MFC set to  0.000000
1/19/2011	11:12:27 AM	SiCl4 MFC set to  50.000000
1/19/2011	11:12:27 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	11:12:27 AM	Tube furnace set to 1000
1/19/2011	11:37:27 AM	H2 valve closed
1/19/2011	11:37:27 AM	BCl3 valve closed
1/19/2011	11:37:27 AM	PH3 valve closed
1/19/2011	11:37:27 AM	SiCl4 pre valve closed
1/19/2011	11:37:27 AM	SiCl4 post valve closed
1/19/2011	11:37:27 AM	Main Vac valve closed
1/19/2011	11:37:27 AM	Bypass valve closed
1/19/2011	11:37:27 AM	Helium valve opened
1/19/2011	11:37:27 AM	Bubbler valve opened
1/19/2011	11:37:27 AM	Helium MFC set to  500.000000
1/19/2011	11:37:27 AM	H2 MFC set to  0.000000
1/19/2011	11:37:27 AM	BCl3 MFC set to  0.000000
1/19/2011	11:37:27 AM	PHl3 MFC set to  0.000000
1/19/2011	11:37:27 AM	SiCl4 MFC set to  0.000000
1/19/2011	11:37:27 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	11:37:28 AM	Tube furnace set to 0
1/19/2011	11:57:28 AM	Helium valve closed
1/19/2011	11:57:28 AM	H2 valve closed
1/19/2011	11:57:28 AM	BCl3 valve closed
1/19/2011	11:57:28 AM	PH3 valve closed
1/19/2011	11:57:28 AM	SiCl4 pre valve closed
1/19/2011	11:57:28 AM	SiCl4 post valve closed
1/19/2011	11:57:28 AM	Main Vac valve closed
1/19/2011	11:57:28 AM	Bypass valve closed
1/19/2011	11:57:28 AM	Bubbler valve closed
1/19/2011	11:57:28 AM	Helium MFC set to  0.000000
1/19/2011	11:57:28 AM	H2 MFC set to  0.000000
1/19/2011	11:57:28 AM	BCl3 MFC set to  0.000000
1/19/2011	11:57:28 AM	PHl3 MFC set to  0.000000
1/19/2011	11:57:28 AM	SiCl4 MFC set to  0.000000
1/19/2011	11:57:28 AM	Bypass solenoid MFC set to  0.000000
1/19/2011	11:57:28 AM	Tube furnace set to 0
1/19/2011	11:57:28 AM	Run finished at 11:57 AM
1/19/2011	12:26:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2011	12:26:03 PM	Recipe started at 12:26 PM
1/19/2011	12:26:03 PM	H2 valve closed
1/19/2011	12:26:03 PM	BCl3 valve closed
1/19/2011	12:26:03 PM	PH3 valve closed
1/19/2011	12:26:03 PM	SiCl4 pre valve closed
1/19/2011	12:26:03 PM	SiCl4 post valve closed
1/19/2011	12:26:03 PM	Main Vac valve closed
1/19/2011	12:26:03 PM	Bypass valve closed
1/19/2011	12:26:03 PM	Bubbler valve closed
1/19/2011	12:26:04 PM	Helium valve opened
1/19/2011	12:26:04 PM	Helium MFC set to  500.000000
1/19/2011	12:26:04 PM	H2 MFC set to  0.000000
1/19/2011	12:26:04 PM	BCl3 MFC set to  0.000000
1/19/2011	12:26:04 PM	PHl3 MFC set to  0.000000
1/19/2011	12:26:04 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:26:04 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:26:04 PM	Tube furnace set to 0
1/19/2011	12:26:07 PM	Helium valve closed
1/19/2011	12:26:07 PM	H2 valve closed
1/19/2011	12:26:07 PM	BCl3 valve closed
1/19/2011	12:26:07 PM	PH3 valve closed
1/19/2011	12:26:07 PM	SiCl4 pre valve closed
1/19/2011	12:26:07 PM	SiCl4 post valve closed
1/19/2011	12:26:07 PM	Main Vac valve closed
1/19/2011	12:26:07 PM	Bypass valve closed
1/19/2011	12:26:07 PM	Bubbler valve closed
1/19/2011	12:26:07 PM	Helium MFC set to  0.000000
1/19/2011	12:26:07 PM	H2 MFC set to  0.000000
1/19/2011	12:26:07 PM	BCl3 MFC set to  0.000000
1/19/2011	12:26:07 PM	PHl3 MFC set to  0.000000
1/19/2011	12:26:07 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:26:07 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:26:07 PM	Tube furnace set to 0
1/19/2011	12:26:07 PM	Run finished at 12:26 PM
1/19/2011	12:26:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2011	12:30:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	12:30:05 PM	Recipe started at 12:30 PM
1/19/2011	12:30:05 PM	Helium valve closed
1/19/2011	12:30:05 PM	H2 valve closed
1/19/2011	12:30:05 PM	BCl3 valve closed
1/19/2011	12:30:05 PM	PH3 valve closed
1/19/2011	12:30:05 PM	SiCl4 pre valve closed
1/19/2011	12:30:05 PM	SiCl4 post valve closed
1/19/2011	12:30:05 PM	Main Vac valve closed
1/19/2011	12:30:05 PM	Bubbler valve closed
1/19/2011	12:30:05 PM	Bypass valve opened
1/19/2011	12:30:05 PM	Helium MFC set to  0.000000
1/19/2011	12:30:05 PM	H2 MFC set to  0.000000
1/19/2011	12:30:05 PM	BCl3 MFC set to  0.000000
1/19/2011	12:30:05 PM	PHl3 MFC set to  0.000000
1/19/2011	12:30:05 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:30:05 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:30:05 PM	Tube furnace set to 0
1/19/2011	12:30:36 PM	Helium valve closed
1/19/2011	12:30:36 PM	H2 valve closed
1/19/2011	12:30:36 PM	BCl3 valve closed
1/19/2011	12:30:36 PM	PH3 valve closed
1/19/2011	12:30:36 PM	SiCl4 pre valve closed
1/19/2011	12:30:36 PM	SiCl4 post valve closed
1/19/2011	12:30:36 PM	Bubbler valve closed
1/19/2011	12:30:36 PM	Main Vac valve opened
1/19/2011	12:30:36 PM	Bypass valve opened
1/19/2011	12:30:36 PM	Helium MFC set to  0.000000
1/19/2011	12:30:36 PM	H2 MFC set to  0.000000
1/19/2011	12:30:36 PM	BCl3 MFC set to  0.000000
1/19/2011	12:30:36 PM	PHl3 MFC set to  0.000000
1/19/2011	12:30:36 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:30:36 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:30:36 PM	Tube furnace set to 0
1/19/2011	12:30:36 PM	Run finished at 12:30 PM
1/19/2011	12:30:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	12:48:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	12:48:43 PM	Recipe started at 12:48 PM
1/19/2011	12:48:43 PM	Helium valve closed
1/19/2011	12:48:43 PM	H2 valve closed
1/19/2011	12:48:44 PM	BCl3 valve closed
1/19/2011	12:48:44 PM	PH3 valve closed
1/19/2011	12:48:44 PM	SiCl4 pre valve closed
1/19/2011	12:48:44 PM	SiCl4 post valve closed
1/19/2011	12:48:44 PM	Main Vac valve closed
1/19/2011	12:48:44 PM	Bubbler valve closed
1/19/2011	12:48:44 PM	Bypass valve opened
1/19/2011	12:48:44 PM	Helium MFC set to  0.000000
1/19/2011	12:48:44 PM	H2 MFC set to  0.000000
1/19/2011	12:48:44 PM	BCl3 MFC set to  0.000000
1/19/2011	12:48:44 PM	PHl3 MFC set to  0.000000
1/19/2011	12:48:44 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:48:44 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:48:44 PM	Tube furnace set to 0
1/19/2011	12:48:44 PM	Helium valve closed
1/19/2011	12:48:44 PM	H2 valve closed
1/19/2011	12:48:44 PM	BCl3 valve closed
1/19/2011	12:48:44 PM	PH3 valve closed
1/19/2011	12:48:44 PM	SiCl4 pre valve closed
1/19/2011	12:48:44 PM	SiCl4 post valve closed
1/19/2011	12:48:44 PM	Bubbler valve closed
1/19/2011	12:48:44 PM	Main Vac valve opened
1/19/2011	12:48:44 PM	Bypass valve opened
1/19/2011	12:48:44 PM	Helium MFC set to  0.000000
1/19/2011	12:48:44 PM	H2 MFC set to  0.000000
1/19/2011	12:48:44 PM	BCl3 MFC set to  0.000000
1/19/2011	12:48:44 PM	PHl3 MFC set to  0.000000
1/19/2011	12:48:44 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:48:44 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:48:44 PM	Tube furnace set to 0
1/19/2011	12:49:44 PM	H2 valve closed
1/19/2011	12:49:44 PM	BCl3 valve closed
1/19/2011	12:49:44 PM	PH3 valve closed
1/19/2011	12:49:44 PM	SiCl4 pre valve closed
1/19/2011	12:49:44 PM	SiCl4 post valve closed
1/19/2011	12:49:44 PM	Bubbler valve closed
1/19/2011	12:49:44 PM	Helium valve opened
1/19/2011	12:49:44 PM	Main Vac valve opened
1/19/2011	12:49:44 PM	Bypass valve opened
1/19/2011	12:49:44 PM	Helium MFC set to  100.000000
1/19/2011	12:49:44 PM	H2 MFC set to  0.000000
1/19/2011	12:49:44 PM	BCl3 MFC set to  0.000000
1/19/2011	12:49:44 PM	PHl3 MFC set to  0.000000
1/19/2011	12:49:44 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:49:44 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:49:44 PM	Tube furnace set to 0
1/19/2011	12:50:44 PM	Helium valve closed
1/19/2011	12:50:44 PM	H2 valve closed
1/19/2011	12:50:44 PM	BCl3 valve closed
1/19/2011	12:50:44 PM	PH3 valve closed
1/19/2011	12:50:44 PM	SiCl4 pre valve closed
1/19/2011	12:50:44 PM	SiCl4 post valve closed
1/19/2011	12:50:44 PM	Bubbler valve closed
1/19/2011	12:50:44 PM	Main Vac valve opened
1/19/2011	12:50:44 PM	Bypass valve opened
1/19/2011	12:50:44 PM	Helium MFC set to  0.000000
1/19/2011	12:50:44 PM	H2 MFC set to  0.000000
1/19/2011	12:50:44 PM	BCl3 MFC set to  0.000000
1/19/2011	12:50:44 PM	PHl3 MFC set to  0.000000
1/19/2011	12:50:44 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:50:44 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:50:45 PM	Tube furnace set to 0
1/19/2011	12:51:45 PM	H2 valve closed
1/19/2011	12:51:45 PM	BCl3 valve closed
1/19/2011	12:51:45 PM	PH3 valve closed
1/19/2011	12:51:45 PM	SiCl4 pre valve closed
1/19/2011	12:51:45 PM	SiCl4 post valve closed
1/19/2011	12:51:45 PM	Bubbler valve closed
1/19/2011	12:51:45 PM	Helium valve opened
1/19/2011	12:51:45 PM	Main Vac valve opened
1/19/2011	12:51:45 PM	Bypass valve opened
1/19/2011	12:51:45 PM	Helium MFC set to  100.000000
1/19/2011	12:51:45 PM	H2 MFC set to  0.000000
1/19/2011	12:51:45 PM	BCl3 MFC set to  0.000000
1/19/2011	12:51:45 PM	PHl3 MFC set to  0.000000
1/19/2011	12:51:45 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:51:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:51:45 PM	Tube furnace set to 0
1/19/2011	12:52:45 PM	Helium valve closed
1/19/2011	12:52:45 PM	H2 valve closed
1/19/2011	12:52:45 PM	BCl3 valve closed
1/19/2011	12:52:45 PM	PH3 valve closed
1/19/2011	12:52:45 PM	SiCl4 pre valve closed
1/19/2011	12:52:45 PM	SiCl4 post valve closed
1/19/2011	12:52:45 PM	Bubbler valve closed
1/19/2011	12:52:45 PM	Main Vac valve opened
1/19/2011	12:52:45 PM	Bypass valve opened
1/19/2011	12:52:45 PM	Helium MFC set to  0.000000
1/19/2011	12:52:45 PM	H2 MFC set to  0.000000
1/19/2011	12:52:45 PM	BCl3 MFC set to  0.000000
1/19/2011	12:52:45 PM	PHl3 MFC set to  0.000000
1/19/2011	12:52:45 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:52:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:52:45 PM	Tube furnace set to 0
1/19/2011	12:53:45 PM	H2 valve closed
1/19/2011	12:53:45 PM	BCl3 valve closed
1/19/2011	12:53:45 PM	PH3 valve closed
1/19/2011	12:53:45 PM	SiCl4 pre valve closed
1/19/2011	12:53:45 PM	SiCl4 post valve closed
1/19/2011	12:53:45 PM	Bubbler valve closed
1/19/2011	12:53:45 PM	Helium valve opened
1/19/2011	12:53:45 PM	Main Vac valve opened
1/19/2011	12:53:45 PM	Bypass valve opened
1/19/2011	12:53:45 PM	Helium MFC set to  100.000000
1/19/2011	12:53:45 PM	H2 MFC set to  0.000000
1/19/2011	12:53:45 PM	BCl3 MFC set to  0.000000
1/19/2011	12:53:45 PM	PHl3 MFC set to  0.000000
1/19/2011	12:53:45 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:53:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:53:45 PM	Tube furnace set to 0
1/19/2011	12:54:45 PM	Helium valve closed
1/19/2011	12:54:45 PM	H2 valve closed
1/19/2011	12:54:45 PM	BCl3 valve closed
1/19/2011	12:54:45 PM	PH3 valve closed
1/19/2011	12:54:45 PM	SiCl4 pre valve closed
1/19/2011	12:54:45 PM	SiCl4 post valve closed
1/19/2011	12:54:45 PM	Bubbler valve closed
1/19/2011	12:54:45 PM	Main Vac valve opened
1/19/2011	12:54:45 PM	Bypass valve opened
1/19/2011	12:54:45 PM	Helium MFC set to  0.000000
1/19/2011	12:54:45 PM	H2 MFC set to  0.000000
1/19/2011	12:54:45 PM	BCl3 MFC set to  0.000000
1/19/2011	12:54:45 PM	PHl3 MFC set to  0.000000
1/19/2011	12:54:45 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:54:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:54:45 PM	Tube furnace set to 0
1/19/2011	12:55:45 PM	H2 valve closed
1/19/2011	12:55:45 PM	BCl3 valve closed
1/19/2011	12:55:45 PM	PH3 valve closed
1/19/2011	12:55:45 PM	SiCl4 pre valve closed
1/19/2011	12:55:45 PM	SiCl4 post valve closed
1/19/2011	12:55:45 PM	Bubbler valve closed
1/19/2011	12:55:45 PM	Helium valve opened
1/19/2011	12:55:45 PM	Main Vac valve opened
1/19/2011	12:55:45 PM	Bypass valve opened
1/19/2011	12:55:45 PM	Helium MFC set to  100.000000
1/19/2011	12:55:45 PM	H2 MFC set to  0.000000
1/19/2011	12:55:45 PM	BCl3 MFC set to  0.000000
1/19/2011	12:55:45 PM	PHl3 MFC set to  0.000000
1/19/2011	12:55:45 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:55:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:55:46 PM	Tube furnace set to 0
1/19/2011	12:56:46 PM	Helium valve closed
1/19/2011	12:56:46 PM	H2 valve closed
1/19/2011	12:56:46 PM	BCl3 valve closed
1/19/2011	12:56:46 PM	PH3 valve closed
1/19/2011	12:56:46 PM	SiCl4 pre valve closed
1/19/2011	12:56:46 PM	SiCl4 post valve closed
1/19/2011	12:56:46 PM	Bubbler valve closed
1/19/2011	12:56:46 PM	Main Vac valve opened
1/19/2011	12:56:46 PM	Bypass valve opened
1/19/2011	12:56:46 PM	Helium MFC set to  0.000000
1/19/2011	12:56:46 PM	H2 MFC set to  0.000000
1/19/2011	12:56:46 PM	BCl3 MFC set to  0.000000
1/19/2011	12:56:46 PM	PHl3 MFC set to  0.000000
1/19/2011	12:56:46 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:56:46 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:56:46 PM	Tube furnace set to 0
1/19/2011	12:57:46 PM	H2 valve closed
1/19/2011	12:57:46 PM	BCl3 valve closed
1/19/2011	12:57:46 PM	PH3 valve closed
1/19/2011	12:57:46 PM	SiCl4 pre valve closed
1/19/2011	12:57:46 PM	SiCl4 post valve closed
1/19/2011	12:57:46 PM	Bubbler valve closed
1/19/2011	12:57:46 PM	Helium valve opened
1/19/2011	12:57:46 PM	Main Vac valve opened
1/19/2011	12:57:46 PM	Bypass valve opened
1/19/2011	12:57:46 PM	Helium MFC set to  100.000000
1/19/2011	12:57:46 PM	H2 MFC set to  0.000000
1/19/2011	12:57:46 PM	BCl3 MFC set to  0.000000
1/19/2011	12:57:46 PM	PHl3 MFC set to  0.000000
1/19/2011	12:57:46 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:57:46 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:57:46 PM	Tube furnace set to 0
1/19/2011	12:58:46 PM	Helium valve closed
1/19/2011	12:58:46 PM	H2 valve closed
1/19/2011	12:58:46 PM	BCl3 valve closed
1/19/2011	12:58:46 PM	PH3 valve closed
1/19/2011	12:58:46 PM	SiCl4 pre valve closed
1/19/2011	12:58:46 PM	SiCl4 post valve closed
1/19/2011	12:58:46 PM	Bubbler valve closed
1/19/2011	12:58:46 PM	Main Vac valve opened
1/19/2011	12:58:46 PM	Bypass valve opened
1/19/2011	12:58:46 PM	Helium MFC set to  0.000000
1/19/2011	12:58:46 PM	H2 MFC set to  0.000000
1/19/2011	12:58:46 PM	BCl3 MFC set to  0.000000
1/19/2011	12:58:46 PM	PHl3 MFC set to  0.000000
1/19/2011	12:58:46 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:58:46 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:58:46 PM	Tube furnace set to 0
1/19/2011	12:59:46 PM	H2 valve closed
1/19/2011	12:59:46 PM	BCl3 valve closed
1/19/2011	12:59:46 PM	PH3 valve closed
1/19/2011	12:59:46 PM	SiCl4 pre valve closed
1/19/2011	12:59:46 PM	SiCl4 post valve closed
1/19/2011	12:59:46 PM	Bubbler valve closed
1/19/2011	12:59:46 PM	Helium valve opened
1/19/2011	12:59:46 PM	Main Vac valve opened
1/19/2011	12:59:46 PM	Bypass valve opened
1/19/2011	12:59:46 PM	Helium MFC set to  100.000000
1/19/2011	12:59:46 PM	H2 MFC set to  0.000000
1/19/2011	12:59:46 PM	BCl3 MFC set to  0.000000
1/19/2011	12:59:46 PM	PHl3 MFC set to  0.000000
1/19/2011	12:59:46 PM	SiCl4 MFC set to  0.000000
1/19/2011	12:59:46 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	12:59:46 PM	Tube furnace set to 0
1/19/2011	1:00:46 PM	Helium valve closed
1/19/2011	1:00:46 PM	H2 valve closed
1/19/2011	1:00:46 PM	BCl3 valve closed
1/19/2011	1:00:46 PM	PH3 valve closed
1/19/2011	1:00:46 PM	SiCl4 pre valve closed
1/19/2011	1:00:46 PM	SiCl4 post valve closed
1/19/2011	1:00:46 PM	Bubbler valve closed
1/19/2011	1:00:46 PM	Main Vac valve opened
1/19/2011	1:00:46 PM	Bypass valve opened
1/19/2011	1:00:46 PM	Helium MFC set to  0.000000
1/19/2011	1:00:46 PM	H2 MFC set to  0.000000
1/19/2011	1:00:46 PM	BCl3 MFC set to  0.000000
1/19/2011	1:00:46 PM	PHl3 MFC set to  0.000000
1/19/2011	1:00:46 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:00:46 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:00:47 PM	Tube furnace set to 0
1/19/2011	1:01:47 PM	H2 valve closed
1/19/2011	1:01:47 PM	BCl3 valve closed
1/19/2011	1:01:47 PM	PH3 valve closed
1/19/2011	1:01:47 PM	SiCl4 pre valve closed
1/19/2011	1:01:47 PM	SiCl4 post valve closed
1/19/2011	1:01:47 PM	Bubbler valve closed
1/19/2011	1:01:47 PM	Helium valve opened
1/19/2011	1:01:47 PM	Main Vac valve opened
1/19/2011	1:01:47 PM	Bypass valve opened
1/19/2011	1:01:47 PM	Helium MFC set to  100.000000
1/19/2011	1:01:47 PM	H2 MFC set to  0.000000
1/19/2011	1:01:47 PM	BCl3 MFC set to  0.000000
1/19/2011	1:01:47 PM	PHl3 MFC set to  0.000000
1/19/2011	1:01:47 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:01:47 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:01:47 PM	Tube furnace set to 0
1/19/2011	1:02:47 PM	Helium valve closed
1/19/2011	1:02:47 PM	H2 valve closed
1/19/2011	1:02:47 PM	BCl3 valve closed
1/19/2011	1:02:47 PM	PH3 valve closed
1/19/2011	1:02:47 PM	SiCl4 pre valve closed
1/19/2011	1:02:47 PM	SiCl4 post valve closed
1/19/2011	1:02:47 PM	Bubbler valve closed
1/19/2011	1:02:47 PM	Main Vac valve opened
1/19/2011	1:02:47 PM	Bypass valve opened
1/19/2011	1:02:47 PM	Helium MFC set to  0.000000
1/19/2011	1:02:47 PM	H2 MFC set to  0.000000
1/19/2011	1:02:47 PM	BCl3 MFC set to  0.000000
1/19/2011	1:02:47 PM	PHl3 MFC set to  0.000000
1/19/2011	1:02:47 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:02:47 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:02:47 PM	Tube furnace set to 0
1/19/2011	1:03:47 PM	H2 valve closed
1/19/2011	1:03:47 PM	BCl3 valve closed
1/19/2011	1:03:47 PM	PH3 valve closed
1/19/2011	1:03:47 PM	SiCl4 pre valve closed
1/19/2011	1:03:47 PM	SiCl4 post valve closed
1/19/2011	1:03:47 PM	Bubbler valve closed
1/19/2011	1:03:47 PM	Helium valve opened
1/19/2011	1:03:47 PM	Main Vac valve opened
1/19/2011	1:03:47 PM	Bypass valve opened
1/19/2011	1:03:47 PM	Helium MFC set to  100.000000
1/19/2011	1:03:47 PM	H2 MFC set to  0.000000
1/19/2011	1:03:47 PM	BCl3 MFC set to  0.000000
1/19/2011	1:03:47 PM	PHl3 MFC set to  0.000000
1/19/2011	1:03:47 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:03:47 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:03:47 PM	Tube furnace set to 0
1/19/2011	1:04:47 PM	Helium valve closed
1/19/2011	1:04:47 PM	H2 valve closed
1/19/2011	1:04:47 PM	BCl3 valve closed
1/19/2011	1:04:47 PM	PH3 valve closed
1/19/2011	1:04:47 PM	SiCl4 pre valve closed
1/19/2011	1:04:47 PM	SiCl4 post valve closed
1/19/2011	1:04:47 PM	Bubbler valve closed
1/19/2011	1:04:47 PM	Main Vac valve opened
1/19/2011	1:04:47 PM	Bypass valve opened
1/19/2011	1:04:47 PM	Helium MFC set to  0.000000
1/19/2011	1:04:47 PM	H2 MFC set to  0.000000
1/19/2011	1:04:47 PM	BCl3 MFC set to  0.000000
1/19/2011	1:04:47 PM	PHl3 MFC set to  0.000000
1/19/2011	1:04:47 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:04:47 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:04:47 PM	Tube furnace set to 0
1/19/2011	1:05:47 PM	H2 valve closed
1/19/2011	1:05:47 PM	BCl3 valve closed
1/19/2011	1:05:47 PM	PH3 valve closed
1/19/2011	1:05:47 PM	SiCl4 pre valve closed
1/19/2011	1:05:47 PM	SiCl4 post valve closed
1/19/2011	1:05:47 PM	Bubbler valve closed
1/19/2011	1:05:47 PM	Helium valve opened
1/19/2011	1:05:47 PM	Main Vac valve opened
1/19/2011	1:05:47 PM	Bypass valve opened
1/19/2011	1:05:47 PM	Helium MFC set to  100.000000
1/19/2011	1:05:47 PM	H2 MFC set to  0.000000
1/19/2011	1:05:47 PM	BCl3 MFC set to  0.000000
1/19/2011	1:05:47 PM	PHl3 MFC set to  0.000000
1/19/2011	1:05:47 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:05:47 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:05:48 PM	Tube furnace set to 0
1/19/2011	1:06:48 PM	Helium valve closed
1/19/2011	1:06:48 PM	H2 valve closed
1/19/2011	1:06:48 PM	BCl3 valve closed
1/19/2011	1:06:48 PM	PH3 valve closed
1/19/2011	1:06:48 PM	SiCl4 pre valve closed
1/19/2011	1:06:48 PM	SiCl4 post valve closed
1/19/2011	1:06:48 PM	Bubbler valve closed
1/19/2011	1:06:48 PM	Main Vac valve opened
1/19/2011	1:06:48 PM	Bypass valve opened
1/19/2011	1:06:48 PM	Helium MFC set to  0.000000
1/19/2011	1:06:48 PM	H2 MFC set to  0.000000
1/19/2011	1:06:48 PM	BCl3 MFC set to  0.000000
1/19/2011	1:06:48 PM	PHl3 MFC set to  0.000000
1/19/2011	1:06:48 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:06:48 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:06:48 PM	Tube furnace set to 0
1/19/2011	1:07:48 PM	H2 valve closed
1/19/2011	1:07:48 PM	BCl3 valve closed
1/19/2011	1:07:48 PM	PH3 valve closed
1/19/2011	1:07:48 PM	SiCl4 pre valve closed
1/19/2011	1:07:48 PM	SiCl4 post valve closed
1/19/2011	1:07:48 PM	Bubbler valve closed
1/19/2011	1:07:48 PM	Helium valve opened
1/19/2011	1:07:48 PM	Main Vac valve opened
1/19/2011	1:07:48 PM	Bypass valve opened
1/19/2011	1:07:48 PM	Helium MFC set to  100.000000
1/19/2011	1:07:48 PM	H2 MFC set to  0.000000
1/19/2011	1:07:48 PM	BCl3 MFC set to  0.000000
1/19/2011	1:07:48 PM	PHl3 MFC set to  0.000000
1/19/2011	1:07:48 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:07:48 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:07:48 PM	Tube furnace set to 0
1/19/2011	1:08:48 PM	Helium valve closed
1/19/2011	1:08:48 PM	H2 valve closed
1/19/2011	1:08:48 PM	BCl3 valve closed
1/19/2011	1:08:48 PM	PH3 valve closed
1/19/2011	1:08:48 PM	SiCl4 pre valve closed
1/19/2011	1:08:48 PM	SiCl4 post valve closed
1/19/2011	1:08:48 PM	Bubbler valve closed
1/19/2011	1:08:48 PM	Main Vac valve opened
1/19/2011	1:08:48 PM	Bypass valve opened
1/19/2011	1:08:48 PM	Helium MFC set to  0.000000
1/19/2011	1:08:48 PM	H2 MFC set to  0.000000
1/19/2011	1:08:48 PM	BCl3 MFC set to  0.000000
1/19/2011	1:08:48 PM	PHl3 MFC set to  0.000000
1/19/2011	1:08:48 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:08:48 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:08:48 PM	Tube furnace set to 0
1/19/2011	1:08:49 PM	Run finished at 1:08 PM
1/19/2011	1:08:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	1:24:35 PM	Recipe started at 1:24 PM
1/19/2011	1:24:35 PM	Helium valve closed
1/19/2011	1:24:35 PM	BCl3 valve closed
1/19/2011	1:24:35 PM	PH3 valve closed
1/19/2011	1:24:35 PM	SiCl4 pre valve closed
1/19/2011	1:24:35 PM	SiCl4 post valve closed
1/19/2011	1:24:35 PM	Main Vac valve closed
1/19/2011	1:24:35 PM	Bypass valve closed
1/19/2011	1:24:35 PM	Bubbler valve closed
1/19/2011	1:24:35 PM	H2 valve opened
1/19/2011	1:24:35 PM	Helium MFC set to  0.000000
1/19/2011	1:24:35 PM	H2 MFC set to  500.000000
1/19/2011	1:24:35 PM	BCl3 MFC set to  0.000000
1/19/2011	1:24:35 PM	PHl3 MFC set to  0.000000
1/19/2011	1:24:35 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:24:35 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:24:36 PM	Tube furnace set to 0
1/19/2011	1:25:54 PM	Helium valve closed
1/19/2011	1:25:54 PM	BCl3 valve closed
1/19/2011	1:25:54 PM	PH3 valve closed
1/19/2011	1:25:54 PM	SiCl4 pre valve closed
1/19/2011	1:25:54 PM	SiCl4 post valve closed
1/19/2011	1:25:54 PM	Main Vac valve closed
1/19/2011	1:25:54 PM	Bypass valve closed
1/19/2011	1:25:54 PM	H2 valve opened
1/19/2011	1:25:54 PM	Bubbler valve opened
1/19/2011	1:25:54 PM	Helium MFC set to  0.000000
1/19/2011	1:25:54 PM	H2 MFC set to  500.000000
1/19/2011	1:25:54 PM	BCl3 MFC set to  0.000000
1/19/2011	1:25:54 PM	PHl3 MFC set to  0.000000
1/19/2011	1:25:54 PM	SiCl4 MFC set to  0.000000
1/19/2011	1:25:54 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:25:54 PM	Tube furnace set to 1000
1/19/2011	1:45:54 PM	Helium valve closed
1/19/2011	1:45:54 PM	PH3 valve closed
1/19/2011	1:45:54 PM	Main Vac valve closed
1/19/2011	1:45:54 PM	Bypass valve closed
1/19/2011	1:45:54 PM	H2 valve opened
1/19/2011	1:45:54 PM	BCl3 valve opened
1/19/2011	1:45:54 PM	SiCl4 pre valve opened
1/19/2011	1:45:54 PM	SiCl4 post valve opened
1/19/2011	1:45:54 PM	Bubbler valve opened
1/19/2011	1:45:54 PM	Helium MFC set to  0.000000
1/19/2011	1:45:54 PM	H2 MFC set to  500.000000
1/19/2011	1:45:54 PM	BCl3 MFC set to  2.000000
1/19/2011	1:45:54 PM	PHl3 MFC set to  0.000000
1/19/2011	1:45:54 PM	SiCl4 MFC set to  50.000000
1/19/2011	1:45:54 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	1:45:54 PM	Tube furnace set to 1000
1/19/2011	2:10:54 PM	H2 valve closed
1/19/2011	2:10:54 PM	BCl3 valve closed
1/19/2011	2:10:54 PM	PH3 valve closed
1/19/2011	2:10:54 PM	SiCl4 pre valve closed
1/19/2011	2:10:54 PM	SiCl4 post valve closed
1/19/2011	2:10:54 PM	Main Vac valve closed
1/19/2011	2:10:54 PM	Bypass valve closed
1/19/2011	2:10:54 PM	Helium valve opened
1/19/2011	2:10:54 PM	Bubbler valve opened
1/19/2011	2:10:54 PM	Helium MFC set to  500.000000
1/19/2011	2:10:54 PM	H2 MFC set to  0.000000
1/19/2011	2:10:54 PM	BCl3 MFC set to  0.000000
1/19/2011	2:10:54 PM	PHl3 MFC set to  0.000000
1/19/2011	2:10:54 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:10:54 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:10:54 PM	Tube furnace set to 0
1/19/2011	2:30:54 PM	Helium valve closed
1/19/2011	2:30:54 PM	H2 valve closed
1/19/2011	2:30:54 PM	BCl3 valve closed
1/19/2011	2:30:54 PM	PH3 valve closed
1/19/2011	2:30:54 PM	SiCl4 pre valve closed
1/19/2011	2:30:54 PM	SiCl4 post valve closed
1/19/2011	2:30:54 PM	Main Vac valve closed
1/19/2011	2:30:54 PM	Bypass valve closed
1/19/2011	2:30:54 PM	Bubbler valve closed
1/19/2011	2:30:54 PM	Helium MFC set to  0.000000
1/19/2011	2:30:54 PM	H2 MFC set to  0.000000
1/19/2011	2:30:54 PM	BCl3 MFC set to  0.000000
1/19/2011	2:30:54 PM	PHl3 MFC set to  0.000000
1/19/2011	2:30:54 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:30:54 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:30:54 PM	Tube furnace set to 0
1/19/2011	2:30:54 PM	Run finished at 2:30 PM
1/19/2011	2:39:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	2:39:53 PM	Recipe started at 2:39 PM
1/19/2011	2:39:53 PM	Helium valve closed
1/19/2011	2:39:53 PM	H2 valve closed
1/19/2011	2:39:53 PM	BCl3 valve closed
1/19/2011	2:39:53 PM	PH3 valve closed
1/19/2011	2:39:53 PM	SiCl4 pre valve closed
1/19/2011	2:39:53 PM	SiCl4 post valve closed
1/19/2011	2:39:53 PM	Main Vac valve closed
1/19/2011	2:39:53 PM	Bubbler valve closed
1/19/2011	2:39:53 PM	Bypass valve opened
1/19/2011	2:39:53 PM	Helium MFC set to  0.000000
1/19/2011	2:39:53 PM	H2 MFC set to  0.000000
1/19/2011	2:39:53 PM	BCl3 MFC set to  0.000000
1/19/2011	2:39:53 PM	PHl3 MFC set to  0.000000
1/19/2011	2:39:53 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:39:53 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:39:53 PM	Tube furnace set to 0
1/19/2011	2:40:25 PM	Helium valve closed
1/19/2011	2:40:25 PM	H2 valve closed
1/19/2011	2:40:25 PM	BCl3 valve closed
1/19/2011	2:40:25 PM	PH3 valve closed
1/19/2011	2:40:25 PM	SiCl4 pre valve closed
1/19/2011	2:40:25 PM	SiCl4 post valve closed
1/19/2011	2:40:25 PM	Bubbler valve closed
1/19/2011	2:40:25 PM	Main Vac valve opened
1/19/2011	2:40:25 PM	Bypass valve opened
1/19/2011	2:40:25 PM	Helium MFC set to  0.000000
1/19/2011	2:40:25 PM	H2 MFC set to  0.000000
1/19/2011	2:40:25 PM	BCl3 MFC set to  0.000000
1/19/2011	2:40:25 PM	PHl3 MFC set to  0.000000
1/19/2011	2:40:25 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:40:25 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:40:25 PM	Tube furnace set to 0
1/19/2011	2:40:25 PM	Run finished at 2:40 PM
1/19/2011	2:40:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	2:41:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	2:42:05 PM	Recipe started at 2:41 PM
1/19/2011	2:42:05 PM	Helium valve closed
1/19/2011	2:42:05 PM	H2 valve closed
1/19/2011	2:42:05 PM	BCl3 valve closed
1/19/2011	2:42:05 PM	PH3 valve closed
1/19/2011	2:42:05 PM	SiCl4 pre valve closed
1/19/2011	2:42:05 PM	SiCl4 post valve closed
1/19/2011	2:42:05 PM	Main Vac valve closed
1/19/2011	2:42:05 PM	Bubbler valve closed
1/19/2011	2:42:05 PM	Bypass valve opened
1/19/2011	2:42:05 PM	Helium MFC set to  0.000000
1/19/2011	2:42:05 PM	H2 MFC set to  0.000000
1/19/2011	2:42:05 PM	BCl3 MFC set to  0.000000
1/19/2011	2:42:05 PM	PHl3 MFC set to  0.000000
1/19/2011	2:42:05 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:42:05 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:42:06 PM	Tube furnace set to 0
1/19/2011	2:42:06 PM	Helium valve closed
1/19/2011	2:42:06 PM	H2 valve closed
1/19/2011	2:42:06 PM	BCl3 valve closed
1/19/2011	2:42:06 PM	PH3 valve closed
1/19/2011	2:42:06 PM	SiCl4 pre valve closed
1/19/2011	2:42:06 PM	SiCl4 post valve closed
1/19/2011	2:42:06 PM	Bubbler valve closed
1/19/2011	2:42:06 PM	Main Vac valve opened
1/19/2011	2:42:06 PM	Bypass valve opened
1/19/2011	2:42:06 PM	Helium MFC set to  0.000000
1/19/2011	2:42:06 PM	H2 MFC set to  0.000000
1/19/2011	2:42:06 PM	BCl3 MFC set to  0.000000
1/19/2011	2:42:06 PM	PHl3 MFC set to  0.000000
1/19/2011	2:42:06 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:42:06 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:42:06 PM	Tube furnace set to 0
1/19/2011	2:43:06 PM	H2 valve closed
1/19/2011	2:43:06 PM	BCl3 valve closed
1/19/2011	2:43:06 PM	PH3 valve closed
1/19/2011	2:43:06 PM	SiCl4 pre valve closed
1/19/2011	2:43:06 PM	SiCl4 post valve closed
1/19/2011	2:43:06 PM	Bubbler valve closed
1/19/2011	2:43:06 PM	Helium valve opened
1/19/2011	2:43:06 PM	Main Vac valve opened
1/19/2011	2:43:06 PM	Bypass valve opened
1/19/2011	2:43:06 PM	Helium MFC set to  100.000000
1/19/2011	2:43:06 PM	H2 MFC set to  0.000000
1/19/2011	2:43:06 PM	BCl3 MFC set to  0.000000
1/19/2011	2:43:06 PM	PHl3 MFC set to  0.000000
1/19/2011	2:43:06 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:43:06 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:43:06 PM	Tube furnace set to 0
1/19/2011	2:44:06 PM	Helium valve closed
1/19/2011	2:44:06 PM	H2 valve closed
1/19/2011	2:44:06 PM	BCl3 valve closed
1/19/2011	2:44:06 PM	PH3 valve closed
1/19/2011	2:44:06 PM	SiCl4 pre valve closed
1/19/2011	2:44:06 PM	SiCl4 post valve closed
1/19/2011	2:44:06 PM	Bubbler valve closed
1/19/2011	2:44:06 PM	Main Vac valve opened
1/19/2011	2:44:06 PM	Bypass valve opened
1/19/2011	2:44:06 PM	Helium MFC set to  0.000000
1/19/2011	2:44:06 PM	H2 MFC set to  0.000000
1/19/2011	2:44:06 PM	BCl3 MFC set to  0.000000
1/19/2011	2:44:06 PM	PHl3 MFC set to  0.000000
1/19/2011	2:44:06 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:44:06 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:44:06 PM	Tube furnace set to 0
1/19/2011	2:45:06 PM	H2 valve closed
1/19/2011	2:45:06 PM	BCl3 valve closed
1/19/2011	2:45:06 PM	PH3 valve closed
1/19/2011	2:45:06 PM	SiCl4 pre valve closed
1/19/2011	2:45:06 PM	SiCl4 post valve closed
1/19/2011	2:45:06 PM	Bubbler valve closed
1/19/2011	2:45:06 PM	Helium valve opened
1/19/2011	2:45:06 PM	Main Vac valve opened
1/19/2011	2:45:06 PM	Bypass valve opened
1/19/2011	2:45:06 PM	Helium MFC set to  100.000000
1/19/2011	2:45:06 PM	H2 MFC set to  0.000000
1/19/2011	2:45:06 PM	BCl3 MFC set to  0.000000
1/19/2011	2:45:06 PM	PHl3 MFC set to  0.000000
1/19/2011	2:45:06 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:45:06 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:45:07 PM	Tube furnace set to 0
1/19/2011	2:46:07 PM	Helium valve closed
1/19/2011	2:46:07 PM	H2 valve closed
1/19/2011	2:46:07 PM	BCl3 valve closed
1/19/2011	2:46:07 PM	PH3 valve closed
1/19/2011	2:46:07 PM	SiCl4 pre valve closed
1/19/2011	2:46:07 PM	SiCl4 post valve closed
1/19/2011	2:46:07 PM	Bubbler valve closed
1/19/2011	2:46:07 PM	Main Vac valve opened
1/19/2011	2:46:07 PM	Bypass valve opened
1/19/2011	2:46:07 PM	Helium MFC set to  0.000000
1/19/2011	2:46:07 PM	H2 MFC set to  0.000000
1/19/2011	2:46:07 PM	BCl3 MFC set to  0.000000
1/19/2011	2:46:07 PM	PHl3 MFC set to  0.000000
1/19/2011	2:46:07 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:46:07 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:46:07 PM	Tube furnace set to 0
1/19/2011	2:47:07 PM	H2 valve closed
1/19/2011	2:47:07 PM	BCl3 valve closed
1/19/2011	2:47:07 PM	PH3 valve closed
1/19/2011	2:47:07 PM	SiCl4 pre valve closed
1/19/2011	2:47:07 PM	SiCl4 post valve closed
1/19/2011	2:47:07 PM	Bubbler valve closed
1/19/2011	2:47:07 PM	Helium valve opened
1/19/2011	2:47:07 PM	Main Vac valve opened
1/19/2011	2:47:07 PM	Bypass valve opened
1/19/2011	2:47:07 PM	Helium MFC set to  100.000000
1/19/2011	2:47:07 PM	H2 MFC set to  0.000000
1/19/2011	2:47:07 PM	BCl3 MFC set to  0.000000
1/19/2011	2:47:07 PM	PHl3 MFC set to  0.000000
1/19/2011	2:47:07 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:47:07 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:47:07 PM	Tube furnace set to 0
1/19/2011	2:48:07 PM	Helium valve closed
1/19/2011	2:48:07 PM	H2 valve closed
1/19/2011	2:48:07 PM	BCl3 valve closed
1/19/2011	2:48:07 PM	PH3 valve closed
1/19/2011	2:48:07 PM	SiCl4 pre valve closed
1/19/2011	2:48:07 PM	SiCl4 post valve closed
1/19/2011	2:48:07 PM	Bubbler valve closed
1/19/2011	2:48:07 PM	Main Vac valve opened
1/19/2011	2:48:07 PM	Bypass valve opened
1/19/2011	2:48:07 PM	Helium MFC set to  0.000000
1/19/2011	2:48:07 PM	H2 MFC set to  0.000000
1/19/2011	2:48:07 PM	BCl3 MFC set to  0.000000
1/19/2011	2:48:07 PM	PHl3 MFC set to  0.000000
1/19/2011	2:48:07 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:48:07 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:48:07 PM	Tube furnace set to 0
1/19/2011	2:49:07 PM	H2 valve closed
1/19/2011	2:49:07 PM	BCl3 valve closed
1/19/2011	2:49:07 PM	PH3 valve closed
1/19/2011	2:49:07 PM	SiCl4 pre valve closed
1/19/2011	2:49:07 PM	SiCl4 post valve closed
1/19/2011	2:49:07 PM	Bubbler valve closed
1/19/2011	2:49:07 PM	Helium valve opened
1/19/2011	2:49:07 PM	Main Vac valve opened
1/19/2011	2:49:07 PM	Bypass valve opened
1/19/2011	2:49:07 PM	Helium MFC set to  100.000000
1/19/2011	2:49:07 PM	H2 MFC set to  0.000000
1/19/2011	2:49:07 PM	BCl3 MFC set to  0.000000
1/19/2011	2:49:07 PM	PHl3 MFC set to  0.000000
1/19/2011	2:49:07 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:49:07 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:49:07 PM	Tube furnace set to 0
1/19/2011	2:50:07 PM	Helium valve closed
1/19/2011	2:50:07 PM	H2 valve closed
1/19/2011	2:50:07 PM	BCl3 valve closed
1/19/2011	2:50:08 PM	PH3 valve closed
1/19/2011	2:50:08 PM	SiCl4 pre valve closed
1/19/2011	2:50:08 PM	SiCl4 post valve closed
1/19/2011	2:50:08 PM	Bubbler valve closed
1/19/2011	2:50:08 PM	Main Vac valve opened
1/19/2011	2:50:08 PM	Bypass valve opened
1/19/2011	2:50:08 PM	Helium MFC set to  0.000000
1/19/2011	2:50:08 PM	H2 MFC set to  0.000000
1/19/2011	2:50:08 PM	BCl3 MFC set to  0.000000
1/19/2011	2:50:08 PM	PHl3 MFC set to  0.000000
1/19/2011	2:50:08 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:50:08 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:50:08 PM	Tube furnace set to 0
1/19/2011	2:51:08 PM	H2 valve closed
1/19/2011	2:51:08 PM	BCl3 valve closed
1/19/2011	2:51:08 PM	PH3 valve closed
1/19/2011	2:51:08 PM	SiCl4 pre valve closed
1/19/2011	2:51:08 PM	SiCl4 post valve closed
1/19/2011	2:51:08 PM	Bubbler valve closed
1/19/2011	2:51:08 PM	Helium valve opened
1/19/2011	2:51:08 PM	Main Vac valve opened
1/19/2011	2:51:08 PM	Bypass valve opened
1/19/2011	2:51:08 PM	Helium MFC set to  100.000000
1/19/2011	2:51:08 PM	H2 MFC set to  0.000000
1/19/2011	2:51:08 PM	BCl3 MFC set to  0.000000
1/19/2011	2:51:08 PM	PHl3 MFC set to  0.000000
1/19/2011	2:51:08 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:51:08 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:51:08 PM	Tube furnace set to 0
1/19/2011	2:52:08 PM	Helium valve closed
1/19/2011	2:52:08 PM	H2 valve closed
1/19/2011	2:52:08 PM	BCl3 valve closed
1/19/2011	2:52:08 PM	PH3 valve closed
1/19/2011	2:52:08 PM	SiCl4 pre valve closed
1/19/2011	2:52:08 PM	SiCl4 post valve closed
1/19/2011	2:52:08 PM	Bubbler valve closed
1/19/2011	2:52:08 PM	Main Vac valve opened
1/19/2011	2:52:08 PM	Bypass valve opened
1/19/2011	2:52:08 PM	Helium MFC set to  0.000000
1/19/2011	2:52:08 PM	H2 MFC set to  0.000000
1/19/2011	2:52:08 PM	BCl3 MFC set to  0.000000
1/19/2011	2:52:08 PM	PHl3 MFC set to  0.000000
1/19/2011	2:52:08 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:52:08 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:52:08 PM	Tube furnace set to 0
1/19/2011	2:53:08 PM	H2 valve closed
1/19/2011	2:53:08 PM	BCl3 valve closed
1/19/2011	2:53:08 PM	PH3 valve closed
1/19/2011	2:53:08 PM	SiCl4 pre valve closed
1/19/2011	2:53:08 PM	SiCl4 post valve closed
1/19/2011	2:53:08 PM	Bubbler valve closed
1/19/2011	2:53:08 PM	Helium valve opened
1/19/2011	2:53:08 PM	Main Vac valve opened
1/19/2011	2:53:08 PM	Bypass valve opened
1/19/2011	2:53:08 PM	Helium MFC set to  100.000000
1/19/2011	2:53:08 PM	H2 MFC set to  0.000000
1/19/2011	2:53:08 PM	BCl3 MFC set to  0.000000
1/19/2011	2:53:08 PM	PHl3 MFC set to  0.000000
1/19/2011	2:53:08 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:53:08 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:53:08 PM	Tube furnace set to 0
1/19/2011	2:54:08 PM	Helium valve closed
1/19/2011	2:54:08 PM	H2 valve closed
1/19/2011	2:54:08 PM	BCl3 valve closed
1/19/2011	2:54:08 PM	PH3 valve closed
1/19/2011	2:54:08 PM	SiCl4 pre valve closed
1/19/2011	2:54:08 PM	SiCl4 post valve closed
1/19/2011	2:54:08 PM	Bubbler valve closed
1/19/2011	2:54:08 PM	Main Vac valve opened
1/19/2011	2:54:08 PM	Bypass valve opened
1/19/2011	2:54:08 PM	Helium MFC set to  0.000000
1/19/2011	2:54:08 PM	H2 MFC set to  0.000000
1/19/2011	2:54:08 PM	BCl3 MFC set to  0.000000
1/19/2011	2:54:08 PM	PHl3 MFC set to  0.000000
1/19/2011	2:54:08 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:54:08 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:54:08 PM	Tube furnace set to 0
1/19/2011	2:55:08 PM	H2 valve closed
1/19/2011	2:55:09 PM	BCl3 valve closed
1/19/2011	2:55:09 PM	PH3 valve closed
1/19/2011	2:55:09 PM	SiCl4 pre valve closed
1/19/2011	2:55:09 PM	SiCl4 post valve closed
1/19/2011	2:55:09 PM	Bubbler valve closed
1/19/2011	2:55:09 PM	Helium valve opened
1/19/2011	2:55:09 PM	Main Vac valve opened
1/19/2011	2:55:09 PM	Bypass valve opened
1/19/2011	2:55:09 PM	Helium MFC set to  100.000000
1/19/2011	2:55:09 PM	H2 MFC set to  0.000000
1/19/2011	2:55:09 PM	BCl3 MFC set to  0.000000
1/19/2011	2:55:09 PM	PHl3 MFC set to  0.000000
1/19/2011	2:55:09 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:55:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:55:09 PM	Tube furnace set to 0
1/19/2011	2:56:09 PM	Helium valve closed
1/19/2011	2:56:09 PM	H2 valve closed
1/19/2011	2:56:09 PM	BCl3 valve closed
1/19/2011	2:56:09 PM	PH3 valve closed
1/19/2011	2:56:09 PM	SiCl4 pre valve closed
1/19/2011	2:56:09 PM	SiCl4 post valve closed
1/19/2011	2:56:09 PM	Bubbler valve closed
1/19/2011	2:56:09 PM	Main Vac valve opened
1/19/2011	2:56:09 PM	Bypass valve opened
1/19/2011	2:56:09 PM	Helium MFC set to  0.000000
1/19/2011	2:56:09 PM	H2 MFC set to  0.000000
1/19/2011	2:56:09 PM	BCl3 MFC set to  0.000000
1/19/2011	2:56:09 PM	PHl3 MFC set to  0.000000
1/19/2011	2:56:09 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:56:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:56:09 PM	Tube furnace set to 0
1/19/2011	2:57:09 PM	H2 valve closed
1/19/2011	2:57:09 PM	BCl3 valve closed
1/19/2011	2:57:09 PM	PH3 valve closed
1/19/2011	2:57:09 PM	SiCl4 pre valve closed
1/19/2011	2:57:09 PM	SiCl4 post valve closed
1/19/2011	2:57:09 PM	Bubbler valve closed
1/19/2011	2:57:09 PM	Helium valve opened
1/19/2011	2:57:09 PM	Main Vac valve opened
1/19/2011	2:57:09 PM	Bypass valve opened
1/19/2011	2:57:09 PM	Helium MFC set to  100.000000
1/19/2011	2:57:09 PM	H2 MFC set to  0.000000
1/19/2011	2:57:09 PM	BCl3 MFC set to  0.000000
1/19/2011	2:57:09 PM	PHl3 MFC set to  0.000000
1/19/2011	2:57:09 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:57:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:57:09 PM	Tube furnace set to 0
1/19/2011	2:58:09 PM	Helium valve closed
1/19/2011	2:58:09 PM	H2 valve closed
1/19/2011	2:58:09 PM	BCl3 valve closed
1/19/2011	2:58:09 PM	PH3 valve closed
1/19/2011	2:58:09 PM	SiCl4 pre valve closed
1/19/2011	2:58:09 PM	SiCl4 post valve closed
1/19/2011	2:58:09 PM	Bubbler valve closed
1/19/2011	2:58:09 PM	Main Vac valve opened
1/19/2011	2:58:09 PM	Bypass valve opened
1/19/2011	2:58:09 PM	Helium MFC set to  0.000000
1/19/2011	2:58:09 PM	H2 MFC set to  0.000000
1/19/2011	2:58:09 PM	BCl3 MFC set to  0.000000
1/19/2011	2:58:09 PM	PHl3 MFC set to  0.000000
1/19/2011	2:58:09 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:58:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:58:09 PM	Tube furnace set to 0
1/19/2011	2:59:09 PM	H2 valve closed
1/19/2011	2:59:09 PM	BCl3 valve closed
1/19/2011	2:59:09 PM	PH3 valve closed
1/19/2011	2:59:09 PM	SiCl4 pre valve closed
1/19/2011	2:59:09 PM	SiCl4 post valve closed
1/19/2011	2:59:09 PM	Bubbler valve closed
1/19/2011	2:59:09 PM	Helium valve opened
1/19/2011	2:59:09 PM	Main Vac valve opened
1/19/2011	2:59:09 PM	Bypass valve opened
1/19/2011	2:59:09 PM	Helium MFC set to  100.000000
1/19/2011	2:59:09 PM	H2 MFC set to  0.000000
1/19/2011	2:59:09 PM	BCl3 MFC set to  0.000000
1/19/2011	2:59:09 PM	PHl3 MFC set to  0.000000
1/19/2011	2:59:09 PM	SiCl4 MFC set to  0.000000
1/19/2011	2:59:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	2:59:09 PM	Tube furnace set to 0
1/19/2011	3:00:10 PM	Helium valve closed
1/19/2011	3:00:10 PM	H2 valve closed
1/19/2011	3:00:10 PM	BCl3 valve closed
1/19/2011	3:00:10 PM	PH3 valve closed
1/19/2011	3:00:10 PM	SiCl4 pre valve closed
1/19/2011	3:00:10 PM	SiCl4 post valve closed
1/19/2011	3:00:10 PM	Bubbler valve closed
1/19/2011	3:00:10 PM	Main Vac valve opened
1/19/2011	3:00:10 PM	Bypass valve opened
1/19/2011	3:00:10 PM	Helium MFC set to  0.000000
1/19/2011	3:00:10 PM	H2 MFC set to  0.000000
1/19/2011	3:00:10 PM	BCl3 MFC set to  0.000000
1/19/2011	3:00:10 PM	PHl3 MFC set to  0.000000
1/19/2011	3:00:10 PM	SiCl4 MFC set to  0.000000
1/19/2011	3:00:10 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	3:00:10 PM	Tube furnace set to 0
1/19/2011	3:01:10 PM	H2 valve closed
1/19/2011	3:01:10 PM	BCl3 valve closed
1/19/2011	3:01:10 PM	PH3 valve closed
1/19/2011	3:01:10 PM	SiCl4 pre valve closed
1/19/2011	3:01:10 PM	SiCl4 post valve closed
1/19/2011	3:01:10 PM	Bubbler valve closed
1/19/2011	3:01:10 PM	Helium valve opened
1/19/2011	3:01:10 PM	Main Vac valve opened
1/19/2011	3:01:10 PM	Bypass valve opened
1/19/2011	3:01:10 PM	Helium MFC set to  100.000000
1/19/2011	3:01:10 PM	H2 MFC set to  0.000000
1/19/2011	3:01:10 PM	BCl3 MFC set to  0.000000
1/19/2011	3:01:10 PM	PHl3 MFC set to  0.000000
1/19/2011	3:01:10 PM	SiCl4 MFC set to  0.000000
1/19/2011	3:01:10 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	3:01:10 PM	Tube furnace set to 0
1/19/2011	3:02:10 PM	Helium valve closed
1/19/2011	3:02:10 PM	H2 valve closed
1/19/2011	3:02:10 PM	BCl3 valve closed
1/19/2011	3:02:10 PM	PH3 valve closed
1/19/2011	3:02:10 PM	SiCl4 pre valve closed
1/19/2011	3:02:10 PM	SiCl4 post valve closed
1/19/2011	3:02:10 PM	Bubbler valve closed
1/19/2011	3:02:10 PM	Main Vac valve opened
1/19/2011	3:02:10 PM	Bypass valve opened
1/19/2011	3:02:10 PM	Helium MFC set to  0.000000
1/19/2011	3:02:10 PM	H2 MFC set to  0.000000
1/19/2011	3:02:10 PM	BCl3 MFC set to  0.000000
1/19/2011	3:02:10 PM	PHl3 MFC set to  0.000000
1/19/2011	3:02:10 PM	SiCl4 MFC set to  0.000000
1/19/2011	3:02:10 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	3:02:10 PM	Tube furnace set to 0
1/19/2011	3:02:11 PM	Run finished at 3:02 PM
1/19/2011	3:02:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/19/2011	5:41:13 PM	Recipe started at 5:41 PM
1/19/2011	5:41:13 PM	Helium valve closed
1/19/2011	5:41:13 PM	BCl3 valve closed
1/19/2011	5:41:13 PM	PH3 valve closed
1/19/2011	5:41:13 PM	SiCl4 pre valve closed
1/19/2011	5:41:13 PM	SiCl4 post valve closed
1/19/2011	5:41:13 PM	Main Vac valve closed
1/19/2011	5:41:13 PM	Bypass valve closed
1/19/2011	5:41:13 PM	Bubbler valve closed
1/19/2011	5:41:13 PM	H2 valve opened
1/19/2011	5:41:13 PM	Helium MFC set to  0.000000
1/19/2011	5:41:13 PM	H2 MFC set to  500.000000
1/19/2011	5:41:13 PM	BCl3 MFC set to  0.000000
1/19/2011	5:41:13 PM	PHl3 MFC set to  0.000000
1/19/2011	5:41:13 PM	SiCl4 MFC set to  0.000000
1/19/2011	5:41:13 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	5:41:14 PM	Tube furnace set to 0
1/19/2011	5:42:34 PM	Helium valve closed
1/19/2011	5:42:34 PM	BCl3 valve closed
1/19/2011	5:42:34 PM	PH3 valve closed
1/19/2011	5:42:34 PM	SiCl4 pre valve closed
1/19/2011	5:42:34 PM	SiCl4 post valve closed
1/19/2011	5:42:34 PM	Main Vac valve closed
1/19/2011	5:42:34 PM	Bypass valve closed
1/19/2011	5:42:34 PM	H2 valve opened
1/19/2011	5:42:34 PM	Bubbler valve opened
1/19/2011	5:42:34 PM	Helium MFC set to  0.000000
1/19/2011	5:42:34 PM	H2 MFC set to  500.000000
1/19/2011	5:42:34 PM	BCl3 MFC set to  0.000000
1/19/2011	5:42:34 PM	PHl3 MFC set to  0.000000
1/19/2011	5:42:34 PM	SiCl4 MFC set to  0.000000
1/19/2011	5:42:34 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	5:42:35 PM	Tube furnace set to 1050
1/19/2011	6:02:35 PM	Helium valve closed
1/19/2011	6:02:35 PM	PH3 valve closed
1/19/2011	6:02:35 PM	Main Vac valve closed
1/19/2011	6:02:35 PM	Bypass valve closed
1/19/2011	6:02:35 PM	H2 valve opened
1/19/2011	6:02:35 PM	BCl3 valve opened
1/19/2011	6:02:35 PM	SiCl4 pre valve opened
1/19/2011	6:02:35 PM	SiCl4 post valve opened
1/19/2011	6:02:35 PM	Bubbler valve opened
1/19/2011	6:02:35 PM	Helium MFC set to  0.000000
1/19/2011	6:02:35 PM	H2 MFC set to  500.000000
1/19/2011	6:02:35 PM	BCl3 MFC set to  2.000000
1/19/2011	6:02:35 PM	PHl3 MFC set to  0.000000
1/19/2011	6:02:35 PM	SiCl4 MFC set to  50.000000
1/19/2011	6:02:35 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	6:02:35 PM	Tube furnace set to 1050
1/19/2011	6:27:35 PM	H2 valve closed
1/19/2011	6:27:35 PM	BCl3 valve closed
1/19/2011	6:27:35 PM	PH3 valve closed
1/19/2011	6:27:35 PM	SiCl4 pre valve closed
1/19/2011	6:27:35 PM	SiCl4 post valve closed
1/19/2011	6:27:35 PM	Main Vac valve closed
1/19/2011	6:27:35 PM	Bypass valve closed
1/19/2011	6:27:35 PM	Helium valve opened
1/19/2011	6:27:35 PM	Bubbler valve opened
1/19/2011	6:27:35 PM	Helium MFC set to  500.000000
1/19/2011	6:27:35 PM	H2 MFC set to  0.000000
1/19/2011	6:27:35 PM	BCl3 MFC set to  0.000000
1/19/2011	6:27:35 PM	PHl3 MFC set to  0.000000
1/19/2011	6:27:35 PM	SiCl4 MFC set to  0.000000
1/19/2011	6:27:35 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	6:27:35 PM	Tube furnace set to 0
1/19/2011	6:47:35 PM	Helium valve closed
1/19/2011	6:47:35 PM	H2 valve closed
1/19/2011	6:47:35 PM	BCl3 valve closed
1/19/2011	6:47:35 PM	PH3 valve closed
1/19/2011	6:47:35 PM	SiCl4 pre valve closed
1/19/2011	6:47:35 PM	SiCl4 post valve closed
1/19/2011	6:47:35 PM	Main Vac valve closed
1/19/2011	6:47:35 PM	Bypass valve closed
1/19/2011	6:47:35 PM	Bubbler valve closed
1/19/2011	6:47:35 PM	Helium MFC set to  0.000000
1/19/2011	6:47:35 PM	H2 MFC set to  0.000000
1/19/2011	6:47:35 PM	BCl3 MFC set to  0.000000
1/19/2011	6:47:35 PM	PHl3 MFC set to  0.000000
1/19/2011	6:47:35 PM	SiCl4 MFC set to  0.000000
1/19/2011	6:47:35 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	6:47:35 PM	Tube furnace set to 0
1/19/2011	6:47:36 PM	Run finished at 6:47 PM
1/19/2011	8:56:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2011	8:56:59 PM	Recipe started at 8:56 PM
1/19/2011	8:56:59 PM	H2 valve closed
1/19/2011	8:56:59 PM	BCl3 valve closed
1/19/2011	8:56:59 PM	PH3 valve closed
1/19/2011	8:56:59 PM	SiCl4 pre valve closed
1/19/2011	8:56:59 PM	SiCl4 post valve closed
1/19/2011	8:56:59 PM	Main Vac valve closed
1/19/2011	8:56:59 PM	Bypass valve closed
1/19/2011	8:56:59 PM	Bubbler valve closed
1/19/2011	8:56:59 PM	Helium valve opened
1/19/2011	8:56:59 PM	Helium MFC set to  500.000000
1/19/2011	8:56:59 PM	H2 MFC set to  0.000000
1/19/2011	8:56:59 PM	BCl3 MFC set to  0.000000
1/19/2011	8:56:59 PM	PHl3 MFC set to  0.000000
1/19/2011	8:56:59 PM	SiCl4 MFC set to  0.000000
1/19/2011	8:56:59 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	8:56:59 PM	Tube furnace set to 0
1/19/2011	8:57:06 PM	Helium valve closed
1/19/2011	8:57:06 PM	H2 valve closed
1/19/2011	8:57:06 PM	BCl3 valve closed
1/19/2011	8:57:06 PM	PH3 valve closed
1/19/2011	8:57:06 PM	SiCl4 pre valve closed
1/19/2011	8:57:06 PM	SiCl4 post valve closed
1/19/2011	8:57:06 PM	Main Vac valve closed
1/19/2011	8:57:06 PM	Bypass valve closed
1/19/2011	8:57:06 PM	Bubbler valve closed
1/19/2011	8:57:06 PM	Helium MFC set to  0.000000
1/19/2011	8:57:06 PM	H2 MFC set to  0.000000
1/19/2011	8:57:06 PM	BCl3 MFC set to  0.000000
1/19/2011	8:57:06 PM	PHl3 MFC set to  0.000000
1/19/2011	8:57:06 PM	SiCl4 MFC set to  0.000000
1/19/2011	8:57:06 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	8:57:06 PM	Tube furnace set to 0
1/19/2011	8:57:07 PM	Run finished at 8:57 PM
1/19/2011	8:57:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2011	9:02:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2011	9:02:28 PM	Recipe started at 9:02 PM
1/19/2011	9:02:28 PM	Helium valve closed
1/19/2011	9:02:28 PM	H2 valve closed
1/19/2011	9:02:28 PM	BCl3 valve closed
1/19/2011	9:02:28 PM	PH3 valve closed
1/19/2011	9:02:28 PM	SiCl4 pre valve closed
1/19/2011	9:02:28 PM	SiCl4 post valve closed
1/19/2011	9:02:28 PM	Main Vac valve closed
1/19/2011	9:02:28 PM	Bubbler valve closed
1/19/2011	9:02:28 PM	Bypass valve opened
1/19/2011	9:02:28 PM	Helium MFC set to  0.000000
1/19/2011	9:02:28 PM	H2 MFC set to  0.000000
1/19/2011	9:02:28 PM	BCl3 MFC set to  0.000000
1/19/2011	9:02:28 PM	PHl3 MFC set to  0.000000
1/19/2011	9:02:28 PM	SiCl4 MFC set to  0.000000
1/19/2011	9:02:28 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	9:02:29 PM	Tube furnace set to 0
1/19/2011	9:03:01 PM	Helium valve closed
1/19/2011	9:03:01 PM	H2 valve closed
1/19/2011	9:03:01 PM	BCl3 valve closed
1/19/2011	9:03:01 PM	PH3 valve closed
1/19/2011	9:03:01 PM	SiCl4 pre valve closed
1/19/2011	9:03:01 PM	SiCl4 post valve closed
1/19/2011	9:03:01 PM	Bubbler valve closed
1/19/2011	9:03:01 PM	Main Vac valve opened
1/19/2011	9:03:01 PM	Bypass valve opened
1/19/2011	9:03:01 PM	Helium MFC set to  0.000000
1/19/2011	9:03:01 PM	H2 MFC set to  0.000000
1/19/2011	9:03:01 PM	BCl3 MFC set to  0.000000
1/19/2011	9:03:01 PM	PHl3 MFC set to  0.000000
1/19/2011	9:03:01 PM	SiCl4 MFC set to  0.000000
1/19/2011	9:03:01 PM	Bypass solenoid MFC set to  0.000000
1/19/2011	9:03:01 PM	Tube furnace set to 0
1/19/2011	9:03:01 PM	Run finished at 9:03 PM
1/19/2011	9:03:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
